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FlexTRAK-BH Plasma Treatment System

TM

FlexTRAK-BH Plasma Treatment System - 18446 March

® A NORDSON COMPANY

SUPERIOR PLASMA TECHNOLOGY FOR HIGH-THROUGHPUT BOAT PROCESSING

APPLICATIONS Plasma processes for pre-die attach, pre-wire bond, pre-mold and post-mold.Contamination Removal & Cleaning

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Fluorine & other halogens HIGH-THROUGHPUT PROCESSING

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Metals & metal oxides The FlexTRAK-BH system’s integrated boat handling systemprovides rapid material transfer for a wide range of boat sizes, up to 2 boats per plasma cycle. Processing can be done with most types of boats, trays and flat carriers. The patented chamber design and control architecture enable short plasma cycle times with very low overhead, ensuring that throughput is maximized and cost of ownership is minimized.

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Organic compoundsEtching

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Modify substrate to improve adhesion ofcomponents mounted post-processing FEATURES AND BENEFITS

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Modify surface of substrate to improve mold material adhesion and reduce delaminationSurface Activation

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Highly uniform plasma treatment

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Production-ready boat/carrier handling

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Improve adhesive flow to eliminate voids andenhance adhesion

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High machine autonomy

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Improve mold material flow to eliminate voids and reduce wire sweep

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Service components accessible via front pull-out shelves

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Improve underfill to eliminate voids, enhance adhesion, increase wicking speed and maintain uniform fillet height

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High throughput and low cost of ownership

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Suitable for FlipChip and other advanced packages The FlexTRAK-BH system is designed for high-throughputprocessing of microelectronic boats, trays, or other flat device carriers, up to 2 boats per plasma cycle. The patented plasma chamber design provides exceptional uniformity and process repeatability. Its three axis symmetrical chamber ensures all areas of the product are treated uniformly, while tight control over all process parameters ensures highly repeatable results.The universal architecture of the FlexTRAK-BH systemaccommodates a wide range of boat sizes in the same system, yielding unmatched production flexibility. Its small chamber volume and proprietary process control system provide short cycle times, with high machine autonomy.