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BW-Series
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Super High Vertical Resolution Non-Contact 3D Surface Proler BW-S500/BW-D500 Series

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Nikon's proprietary scanning-type optical interference measurement technology achieves 1pm* height resolution. * Height resolution specied by algorithm Quickly and accurately measures surface prole from sub-nano to millimeter height ranges, using a single measurement mode. Fully supports high-precision processing technology and advanced material development of the Materials Science eld. Six models available to match application and cost Both the BW-S and BW-D are available in the six types shown below. Piezo driven Electric XY axis Nosepiece 503/507 drive piezo Objective Nosepiece lens...

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8nm Step Height Sample Wide region conguration analysis with stitching The BW-S500/BW-D500 series is calibrated by an 8nm or 8µm VLSI Step Height Standards sample, certified by the NIST. Achieves extremely high accuracy and repeatability as a height measurement system. Electric XY stage and "Digital Stylus Imager 3" software allow stitching with BW-S503/507 and BW-D503/507. Stitching can be done in both vertical and horizontal direction. High Traceability and Repeatability VLSI (8nm Step Height Sample) 9nm Height Measurement Value Variations One-shot image Height measured value (nm)...

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Analytical software spanning basic measurement to advanced analysis Image Transformer Zernike Polynomial Analyzer Performs automatic measurement of distance, height and angle between two points specied by the cursor, as well as two-dimensional roughness (Ra, Rq, Rz) / three-dimensional roughness (Sa, Sq, Sz) Piezo Driven Objective lens driven Nosepiece driven Objective lens driven Nosepiece driven Piezo Scanning Range From the height image of a spherical sample, the ideal spherical surface curve (geometric shape) for the sample's form is calculated, allowing analysis of the sample's surface...

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12701 Grand River Avenue, Brighton, Ml 48116 U.S.A E-mail: Sales.US.NM@nikon.com NIKON METROLOGY EUROPE NV Geldenaaksebaan 329, 3001 Leuven, Belgium Email: Sales.Europe.NM@nikon.com NIKON INSTRUMENTS (SHANGHAI) CO., LTD. (Beijing branch) phone: +86-10-5831-2028 fax: +86-10-5831-2026 (Guangzhou branch) phone: +86-20-3882-0550 fax: +86-20-3882-0580 NIKON INSTRUMENTS KOREA CO., LTD. NIKON INDIA PRIVATE LIMITED E-mail: Sales.UK.NM@nikon.com NIKON METROLOGY SARL E-mail: Sales.France.NM@nikon.com NIKON METROLOGY GMBH E-mail: Sales.Germany.NM@nikon.com Printed in Japan (1403-03) Am/M Code No....

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