UP193-FX - New Wave Research - #1

New Wave Research introduces the UP193FX, the only short pulse width (<4ns) excimer laser system specifically designed for laser ablation to combine the super-flat beam profile and deep UV wavelength of an excimer system with the low-ns pulse dura­tion of solid state lasers.

• Low 193nm wavelength for excellent cou­pling and low depth penetration in all sam­ple types.

• Short pulse width (<4ns) minimises frac­tionation and maximises irradiance (>3 GW/cm²).

• Unique beam homogenisation for ultra-flat beam profile.

• Small-footprint, all-in-one fully-mobile la­ser ablation system with on-board safety-sealed gas cabinet.

The UP193FX utilises the ATL Ex300Si ArF excimer laser from ATL LaserTechnik (inset, right), which gives superior performance and completely stable output energy for the life­time of the ArF gas. It is capable of running at up to 100 Hz fully air-cooled. The ATL laser also utilises an automatic solenoid gas han­dling system for one-button automated gas exchange.

The system is controlled through New Wave Research's class-leading software (left) and includes a range of new features such as a Bezier curve line scan function.

Other new features specifically designed for the UP193FX include fast aperture switching and software-controlled N2 purge control, plus the Online Gas Exchange function, which automatically exchanges a portion of ArF gas in the resonator as it degrades without inter­ruption of laser firing whilst maintaining a con­stant and stable output.

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