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SQ-100

UHV

SeriesPiezoelectric Motors

for ultrahigh vacuum nanopositioning

FEATURES 20 nm resolution Holds position with power off No mechanical feed-throughs Low outgassing Long travel (to 50 mm) Low heating Compact, fast, and smooth 10

-10

Torr Ultrahigh Vacuum (UHV) SQUIGGLE Motors

The UHV-compatible SQUIGGLE motor operates at 10

-10

Torr for automated ultrahigh vacuum alignment without mechanical feed-throughs. It provides 20 nanometer resolution with low outgassing.

Drive electronics

New Scale motor controllers generate ultrasonic signals to vibrate the motor’s piezoelectric element. Users can control the SQUIGGLE motor motion via computer interface, analog input, or a manual handset. We offer both benchtop controllers (SQ-2300) for laboratory use, and credit-card sized PCB drive cards (MC-1000) for easy integration into OEM systems and instruments. See the drive electronics data sheets for more information. SQ-2300 controller includes an ActiveX command library that can be called from the New Scale application, LabVIEW, or your own scripts.

Motor Specifications SQ-100UHV Series

Mounting Diameter 12.45 mm Shaft Diameter/Thread 3/16 in x 100 thds/in (4.76 mm x 0.25 mm lead) Shaft Length/Travel see ordering information on page 2 Stall Force 5 N Resolution (typical) 20 nm Start/Stop Time 0.2 m/s Speed Range 0.001 to 1 mm/s Off-Power Hold Yes (self-locking threads) Operating Temperature +40 to -20°C Bakeout Temperature 100 °C max New Scale Technologies, Inc. | www.NewScaleTech.com | Phone (585) 924-4450