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PRODUCT DATA SHEET

3D Surface Measurement System

NanoFocus µsurf® cylinderinspector datasheet - 25059 ikh\

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cylinderinspector

NanoFocus µsurf
® cylinderinspector is an optical 3D surface measurement system for contactless cylinder bore measurement. optical, non-contact user-friendly nanometer accuracy The µsurf
® cylinderinspector includes an angled optical insertion system matched to the geometry of the cyl-inder, thus allowing measurement in cylinder bores from 70 mm diameter up to an insertion depth of 165 mm. The system is fully motorized and can be joystick driven to any measure-ment point (radial, axial) within the cylinder bore. Besides evaluating ISO roughness values, extensive software tools are available to determine tribologically relevant 3D surface structures. robust technique The precision of the measuring head is in the nanometer range. The measurement results show abso-lute agreement with tactile meth-ods. Due to its high spatial resolu-tion and excellent reproduction of steep edges, the instrument can be applied in addition and/or substitu-tion of scanning electron micros-copy (SEM). ApplicationsR&D - Process Control - Quality Assurance: high speed, non-contact 3D topography and roughness measurement of cylinder bore surfaces measurement of 3D structure parameters e.g. depth of silicon crystal plateaus and distribution of silicon crystals texture analysis roughness parameter calculation compliant with DIN EN ISO calculation of 3D roughness parameters wear analysis defect detection
NanoFocus AG | Lindnerstrasse 98 | D-46149 Oberhausen | Phone: +49 (0) 208 62000-51 | Fax: +49 (0) 208 62000-99 | sales@nanofocus.de | www.nanofocus.de Customer center | Nobelstraße 9–13 | D-76275 Ettlingen | Phone: +49 (0) 7243 7158-40 | Fax: +49 (0) 7243 7158-59 | ettlingen@nanofocus.de | www.nanofocus.de