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Nanofocus µscan - NanoFocus


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PRODUCT DATA SHEET f OC U S
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3D Scanning Profilometer
uscan
Versatility and modularity enable NanoFocus uscan® to characterize complex surfaces in the laboratory as well as on the shop floor by means of multi-line scanning optical measurements.
modular design
fast measurement
non-contact, non-destructive
The uscan® is a modular 3D profilometer system for non-contact surface charact­erization in the micrometer and nano­meter ranges. The advanced software concept allows automated measure­ment tasks on the shop floor, but also has applications in laboratory research and development. A variety of inter­changeable sensors offers a range of advantages and is adaptable to many different measurement problems. The confocal point sensor with its high dynamic range is ideal for applications in MEMS and micro-electronics and is able to address very steep profile flanks. The autofocus sensor is the fastest and
most precise point sensor and is best suited to tasks involving flatness and simultaneous roughness measurements. The chromatic aberration white light sensor is compact and with its large working distance is particularly useful for samples with difficult geometry and measuring positions. There is a range of sensors available from small measuring range with high resolution to several millimeters measuring range with medium resolution. The holographic sensor offers wide range measurement possibilities in the field of contour map­ping, e.g. of cast parts or warpage of PCB.
flexible and automatable
Applications
IC-Packaging/SMT: Fast automatic capture of warpage, lead and BGA coplanarity, laser marking, solder paste volume.
Thick Film Hybrids: Automatable measurement of film thickness on ceramic sub­strates, substrate warp and print stretch even on freshly printed paste.
Precision Parts: Measurement of form, waviness and roughness compliant with DIN EN ISO for precision metal parts, plastics and semiconductor materials.
NanoFocus AG | Lindnerstrasse 98 | D-46149 Oberhausen | Phone: +49 (0) 208 62000-51 | Fax: +49 (0) 208 62000-99 | sales@nanofocus.de | www.nanofocus.de Customer center | Nobelstraße 9-13 | D-76275 Ettlingen | Phone: +49 (0) 7243 7158-40 | Fax: +49 (0) 7243 7158-59 | ettlingen@nanofocus.de | www.nanofocus.de

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