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Speci cations

• Wafer Type: Mono or poly-crystalline silicon • Data Output: TCP/IP • Surfaces: As-cut, lapped, etched, SiN layer • Data Triggering: Automatic • Power Requirements: 100/240 VAC; 50/60 Hz; 50 Watts • Rack Dimensions: 455 x 175 x 125 mm. (LxWxH) • Interface: Ethernet

Thickness Measurement

Probe 70-ILAProbe 100-ILA Measurement TechniqueCapacitanceCapacitanceMeasurement Range1.7 mm2.5 mmMeasurement Accuracy+/- 0.25 µm +/- 0.75 µmRepeatability0.05 µm0.10 µmDistance Between Sensors3.4 mm5.0 mm Measurement Spot Size8.0 mm12.0 mmProbe Length10 cm10 cm

Saw Mark Measurement

• Measurement Technique: Laser • Measurement Range: 2.0 mm • Wavelength: 670 nm • Spot Size: 15 µm • Standoff Distance: 25 mm • Frequency Response: 20 kHz max. • Laser Angle: 45 degree • Mark Detection Limit: 2 µm depth • Laser Dimensions: 76 x 75 x 25 mm (L x W x H) • Cable Length: As required • Laser Detector: CMOS technology • Selectable Filter Settings

For information on other non-contact products or custom solutions from MTI Instruments, contact us at 1-800-342-2203 or +1-518-218-2550.

MTI Instruments, Inc.

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325 Washington Avenue ExtensionAlbany, NY 12205 PH: +1-518-218-2550 OR USA TOLL FREE: 1-800-342-2203 FX: +1-518-218-2506 EMAIL: sales@mtiinstruments.com www.mtiinstruments.com MTI_PVSERIES_MAR08 A subsidiary of Mechanical Technology, Inc. (NASDAQ:MKTY)