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PROFORMA Wafer Measurement Systems - MTI Instruments - #6

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Performance Specifications
Wafer Sizes
50-300mm
75-200mm
150-300mm
75-200mm
150-300mm
Measurement
1mm standard
1mm standard
1mm standard
1mm standard
1mm standard
Range
[1.7 mm Extended]
[1.7 mm Extended]
[1.7 mm Extended]
[1.7 mm Extended]
[1.7 mm Extended]
Thickness
Accuracy
+/-0.25um
+/-0.25um
+/-0.25um
+/-0.25um
+/-0.25um
ASTM F533
Repeatability*
0.050um
0.050um
0.050um
0.050um
0.050um
TTV
Accuracy
+/-0.05um
+/-0.05um
+/-0.05um
+/-0.05um
+/-0.05um
ASTM F533
Repeatability*
0.050um
0.050um
0.050um
0.050um
0.050um
Bow
Range
+/-500um[+/-850um]
+/-500um[+/-850um]
+/-500um [+/-850um]
+/-500um [+/-8 50um]
+/-500um [+/-850um]
ASTM F534 ~~
Accuracy
+/-2.0um
+/-2.0um
+/-2.0um
+/-2.0um
+/-2.0um
Repeatability*
0.750um
0.750um
0.750um
0.750um
0.750um
Warp
Range
500um[1500um]
500um [1500um]
500um [1500um]
500um [1500um]
ASTM F1390 ~
Accuracy
+/-2.0um
+/-2.0um
+/-2.0um
+/-2.0um
Repeatability*
0.750um
0.750um
0.750um
0.750um
Flatness (Global)
Accuracy
+/-0.05um
+/-0.05um
+/-0.05um
+/-0.05um
ASTM F1530
Repeatability*
0.030um
0.030um
0.030um
0.030um
Flatness (Site)**
Accuracy
+/-0.05um
+/-0.05um
+/-0.05um
+/-0.05um
ASTM F1530
Repeatability*
0.030um
0.030um
0.030um
0.030um
*Repeatability = 1 Sigma for 10 wafer runs "Minimum Site Size X, Y = 8mm
Wafer Specifications
Materials All semiconducting and semi-insulating materials MTII also offers custom designed
Surfaces As-cut, Lapped, Etched, Polished, Patterned
Flat/Notch All SEMI Standard Flat(s) and Notches solutions for your semiconductor and
Conductivity P or N Type
Wafer Mounting Bare Wafer, Sapphire/Tape Base photovoltaic process applications
For information on other non-contact products or custom solutions from MTI Instruments, contact us at 1-800-342-2203 or +1-518-218-2550.
MTI Instruments, Inc.
325 Washington Avenue Extension
Albany, NY 12205
PH: +1-518-218-2550
OR USA TOLL FREE: 1-800-342-2203
fx: +1-518-218-2506 EMAIL: sales@mtiinstruments.com www.mtiinstruments.com
mt tin strum ents
+
+
2500/11.07 SCH MT135049 11.07
A Subsidiary of Mechanical Technology, Inc. (NASDAQ:MKTY)
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