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Due to continuous development, specifications and prices are subject to change without notice. Copyright © 2006
by MKS Instruments, Inc. All rights reserved. HPS® is a registered trademark of MKS Instruments, Inc.
MKS Vacuum Technology
HPS® Products
5330 Sterling Drive
Boulder, CO 80301
Tel: (303) 449.9861
Tel: (800) 345.1967 (in USA)
Bulletin 01/08 - 150/160 Valves
© 2008 MKS Instruments, Inc.
All rights reserved.
MKS Global Headquarters
2 Tech Drive, Suite 201
Andover, MA 01810
Tel: (978) 645.5500
Tel: (800) 227.8766 (in USA)
Web: www.mksinst.com
Email: mks@mksinst.com
Ordering Information
Spare Parts for 150/160 Manual Valves
Nominal Port Size
in (mm)
Knob Seal Set Internal Assembly Kit
Part Number Price Part Number Price Part Number Price
.75” (16)
1.00” (25)
1.50” (40)
2.00” (50)
2.50” (63)
3.00” (80)
100014470
100014470
100014470
100014471
100014471
100014471
100001699
100001700
100001701
100001702
100001703
100001704
100008413
100008414
100008415
100008416
100008417
100008418
Replacement Solenoid Valves
(Series 150/160 up to 3” and V-100)
Voltage and Frequency Watts
Part
Number Price
24VAC 50/60 Hz
24VDC
12 VDC
120VAC 50/60 Hz
208VAC 50/60 Hz
220VAC 50/60 Hz
6.0
7.0
7.0
7.5
7.5
7.5
100008164
100008163
100008539
100008165
100008166
100008167
Spare Parts for 150/160 Pneumatic Valves
Nominal Port Size
in (mm)
Limit Switch Retrofit Kit
Internal Assembly Kit
(Includes Seal Set)
Seal Set
(Viton)
Part
Number
Price
Part
Number
Price
Part
Number
Price
.75” (16)
1.00” (25)
1.50” (40)
2.00” (50)
2.50” (63)
3.00” (80)
4.00” (100)
6.00” (160)
100001682
100001520
100001520
100001683
100001683
100001684
100003663
100005802
100006122
100006123
100006124
100006125
100006126
100006127
100006128
100006129
100001673
100001674
100001675
100001676
100001677
100001691
100003876
100006113
Spare Parts for V-100 Valves
Part
Part
Number Price
Pneumatic Seal Set - Viton
Pneumatic Internal Assembly - Viton
Limit Switch Retrofit Kit
Manual Seal Set - Viton
Manual Internal Assembly - Viton
Manual Knob
100008760
100004917
100003663
100004792
100008419
100009486
Replacement Solenoid Valves
(Series 150 4”and 6”)
Voltage and Frequency Watts
Part
Number Price
24VAC 50/60 Hz*
24VDC
100-120V/50 Hz
110-130V/60 Hz*
210-240V/50 Hz
220-250V/60 Hz*
4.5
6.7
8.5
6.1
100003640
100003639
100003641
100006166
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