Residual Gas Analysis - MKS Instruments - #6

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Gas Analysis Line Card - 3/08 Specifications are subject to change without notice. TOOLweb®. Resist-Torr®, and PR Index® are registered trademarks, and e-Vision™, e-Vision+™, EasyView™, Process Eye Professional™, Vision 1000-C™, Vision 1000-E™, Vision 1000-I™, Vision 1000-B™, PVD-HPQ-2S™, Cirrus™, MultiGas™, Process Sense™, InDuct™, and Spectra™ are trademarks of MKS Instruments, Inc., Andover, MA. Microsoft® and Windows® are registered trademarks of Microsoft Corporation. © 2008 MKS Instruments. All rights reserved. MKS Gas Analysis Mass Spectrometer Gas Analyzers Spectra™ Products, USA 70 Rio Robles San Jose, CA 95134 Tel: 408.750.0300 FTIR and NDIR Gas Analyzers On-Line Products 651 Lowell Street Methuen, MA 01844 Tel: 978.682.4567 China France Germany Israel Italy Japan Korea Netherlands Singapore Taiwan United Kingdom United States MKS Global Headquarters 2 Tech Drive, Suite 201 Andover, MA 01810 Tel: 978.645.5500 Tel: 800.227.8766 (in USA) Web: www.mksinst.com Spectra™ Products, UK Cowley Way Crewe, Cheshire CW1 6AG Tel: 44.127.025.0150

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