PVS6E
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Calibration & Service Type PVS6E PORTABLE VACUUM CALIBRATION SYSTEM The PVS6E consists of up to three MKS Baratron® Type 690 High Accuracy Absolute capacitance manometers as transfer standards and a high vacuum pumping system, mounted in a sturdy transportable cart. The PVS6E provides NIST traceable calibrations over the pressure range from 10-5 to 1000 mmHg and can be used to calibrate MKS Baratron® Capacitance Manometers, thermocouple gauges, Pirani gauges, convection enhanced Pirani gauges, other capacitance manometers and transmitters, and mechanical/ dial gauges. Hot or cold cathode ionization gauges can be calibrated over the upper end of their range. The PVS6E is a completely re-engineered version of the popular PVS6D. Standard features include a narrow chassis for ease of movement through confined areas, clean room compatibility, dry pumping system, and two-channel display/readout. Features & Benefits • Wide 10-5 to 1000 mmHg calibration range for many different types of vacuum gauges • Can be used as a process or instrument diagnostic tool to eliminate unnecessary replacement of functioning instruments • Calibrates instruments in situ to keep process up and running and to reduce maintenance • Manual operation to meet your requirements • Simple, easy to use system encourages regular instrument calibration resulting in higher process quality and yields • Uninterruptible power supply keeps standards ready to use • NIST traceable calibration helps comply with government regulations, ISO 9000 and other QA program requirements

The PVS6E pumping system consists of an air-cooled hybrid turbomolecular pump, backed by a two stage diaphragm pump. A high vacuum gauge is provided to monitor system performance and base pressure to ensure pressure is low enough for proper zeroing of the transfer standards. The PVS6E is available with manual pressure control capability. The PVS6E has an uninterruptible power supply with sufficient storage to keep the transfer standards warmed up and ready to use for up to 60 minutes, allowing ample time to transport the PVS6E to the process system. The PVS6E can perform off-line as well as...

Specifications Transfer Standard MKS Type 690 Absolute Sensor (NIST traceable); see 690 data sheet for other specifications Baratron Pressure Sensor Accuracy 0.08% of Reading (± temp. coefficients), 0.05% of Reading (± temp. coefficients) (non-linearity, hysteresis, or optional for 1-1000 range and non-repeatability) Resolution (of F.S.) Unit Port Fittings Operating Temperature Range Readout Electronics Power Required Warm-up Time/Start Time 4 hours. However, use of the internal 500 VA UPS will keep the Transfer Standard warmed up and ready for immediate use for at least 60 minutes....

Ordering Inf ormation Ordering Code Example: PVS6EXXXYZ Type PVS6E Portable Vacuum Calibration System Type Number Flow Scale Pressure Ranges in mmHG (XXX) 0.1 1 10 100 1000 Vacant channel Input Power (Y) Standard USA & Canada input power 110 VAC, 60 Hz 220 VAC, 50 Hz Accuracy (Z) Best Available ±0.08% of Reading Dimensional Drawing — Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). MKS Global Headquarters 2 Tech Drive, Suite 201 Andover, MA 01810 Tel: 978.645.5500 Tel: 800.227.8766 Web: www.mksinst.com PVS6E - 8/12 © 2003 MKS Instruments, Inc. All...