VACUUM TECHNOLOGY

MKS is a world leading manufacturer of HPS
® vacuum components and valves. HPS flanges andfittings are available in ISO-KF, ISO Universal, metal-sealed CF, and butt weld versions, as well as a complete line of stainless steelfittings specifically designed for biopharmaceutical processing. Angle and in line valves, soft-start valves, and safety shut-off valves,in heated or unheated configurations, are also offered. Products are manufactured to the highest industry cleanliness standards inMKS’ Boulder, Colorado facility. In addition to offering the broadest line of standard components, MKS can provide customdesigned chambers, manifolds and components.MKS is the world leader in Effluent Management Subsystems
™ for vacuum processes. Minimizing the buildup of residues invacuum pumping lines pays back in improved process yield and system uptime . MKS’ range of HPS heaters keep reaction by-products in the vapor phase until they can be safely collected in an appropriate HPS trap . Detailed process understanding byMKS engineers, along with a choice of heater temperatures and trap designs, allows MKS to provide the optimum subsystemsolution for the particular process.For vacuum measurement from 10
-11 to atmosphere, MKS offers a broad range of traditional easy-to-operate gauge controllers withsensors, including Pirani, convection Pirani, hot and cold cathode, as well as vacuum transducers based on microprocessortechnology. These compact vacuum transducers integrate multiple MicroPirani
™ , Piezo and ionization sensors and theirassociated electronics in a single package for significant cost savings. They feature standard analog output with setpoint relays foraccurate process control. Other HPS models include digital communication capabilities for expanded system control.

FLOW MEASUREMENT & CONTROL

The MKS family of digital, analog, high temperature, metal sealed, elastomersealed, range adjustable, and pressure-based mass flow controllers (MFC) and mass flow meters measure and control the flow ofcritical gases in a wide variety of applications, such as semiconductor manufacturing, optical coatings and flat panel displaymanufacturing.The MKS πππππ MFC (piMFC) pressure insensitive mass flow controller helps end-users increase tool throughput. Real-time accurateflow control that is insensitive to upstream and downstream pressure disturbances is provided through advanced digital algo-rithms, resulting in better chamber matching. A web-based browser interface allows for setup and troubleshooting of MFC’s insitu, thereby reducing the number of “No Problem Found” MFC replacements and the need to break the process gas line. Toverify the flow rates of the gases delivered to the process, the MKS Mass Flow Verifier is installed within the gas panel, and eliminates downtime associated with unnecessary removal of MFCs from the system.New processes need new materials and MKS is in the forefront of advanced materials delivery. Reactants that are in solid, liquid orvapor form can be delivered to the process with MKS delivery technology. Using products that include MKS’ patented direct liquidinjection systems and pressure-based vapor flow controllers, our applications specialists are able to tailor a delivery system for themost challenging processes.

LEAK DETECTION

Incorporating advanced technology in the area of mass spectrometry and vacuum technology, PICO
® portable helium leak detectors provide fast and sensitive helium leak detection and are the smallest mass spectrometer-based leakdetectors available in the world today. Offered in both vacuum and sniffing versions , and weighing an average of 7Kg, the PICOdetects leaks from vacuum or pressurized systems and has a minimum detectable leak rate of 1 x 10-10 atm cc/s. These trulyportable leak detectors can be quickly and easily transported without the need for bulky transport carts. Additional features includebattery operation and removable hand-held display.

CALIBRATION

MKS calibration products range from simple carrying case-enclosed Transfer Standards to completely automated Primary Standard calibration systems. Based on the MKS Baratron capacitance manometer and the spinning rotorgauge, CalStand
® pressure calibrators are designed for use from 10
-7 mmHg to 500 psia/g (20 psid to 10
-5 inH
2 0). Gas flow ratecalibrators are based on a variety of measurement technologies and are designed for use from under 1 sccm to 20 slm (425 scfh).

INTEGRATED SUBSYSTEMS

As more and more semiconductor device manufacturers are looking to OEMs to develop themanufacturing processes and the integration of those processes, the need for companies like MKS to provide the OEMs with subsystem engineering and manufacturing also increases. By utilizing its broad technology base, MKS is uniquely able to designand manufacture integrated subsystems that help our customers improve the productivity of their process tools. Drawing uponour extensive process expertise , we are able to combine our instruments and technologies into application-specific subsystems thatcan solve particular tool challenges while reducing size, complexity, and overall costs .
Product Overview - 9/04© 2004 MKS Instruments, Inc. All rights reserved. www.mksinst.com978-284-4000