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| | | Hyper MF / MF-U | | |
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| | | FEATURES • Theworld highest accuracyXY measuring accuracyof (0.9+3L/1000)um • Selectable LAF function | | |
| | | • High operatability and repeatability • Three axes motorized control Power-drive auto focus unit is a standard feature. | | |
| | | Technical Data: Hyper MF Observationimage: Erectimage Optical tube: Monocular or binocular tube (optional, depression: 25°), Reticle projection method, w/TVmount,Opticalpath ratio (eyepiece/TV mount: 50/50) Eyepiece lens (optional): 10X, 15X, 20X | | |
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| | | Objective: Contourillumination
| | 3X(375-037),W.D.:72.5mm Optional: 1X, 5X 10X, 20X, 50X, 100X | | |
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| | | • Optical system: Telecentric illumination with adjustable aperture diaphragms • Functions: Light intensity adjustable, 100steps brightness adjustment | | |
| | | HyperMF-U (w/ optional optical tube, revolver and objective) | | |
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| | | Surfaceillumination •Lightsource: •Opticalsystem: • Functions: Data output Power supply: Mass | | |
| | | Halogen bulb (12V, 50W) Koehler illumination with adjustable aperture diaphragms Light intensity adjustable, 100steps brightness adjustment Via RS-232C interface 100/110/120/220/240V AC, 50/60Hz 250kg(mainunit), 14kg(powerunit) | | |
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| | | Technical Data: Hyper MF-U | | |
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| | | Observationimage: Opticaltube: | | Erect image Siedentoph type (pupil distance adjustment: 51 -76mm), IXtubelens, Binocular tube (depression: 25°), Reticle projection method, w/TVmount.Opticalpath ratio (eyepiece/TV mount: 50/50) 10X (field No.:24mm), Optional: 15X, 20X Power revolver M / BD Plan Apo objective from 1Xto 100X (Refer to the page 394 for more details.) Halogen bulb (12V, 100W) Telecentric illumination with adjustable aperture diaphragms Light intensity adjustable, 100steps brightness adjustment Halogen bulb (12V, 50W) Koehler illumination with adjustable aperture diaphragms Light intensity adjustable, 100steps brightness adjustment Via RS-232C interface 100/110/120/220/240V AC, 50/60Hz 255kg(mainunit), 14kg(powerunit) | | |
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| | | Eyepiece lens: Revolver (optional): Objective (optional): | | |
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| | | Contourillumination •Lightsource: •Opticalsystem: | | |
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| | | • Functions: Surfaceillumination •Lightsource: •Opticalsystem: | | |
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| | | • Functions: Data output Power supply: Mass | | |
| | | SPECIFICATIONS | | |
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| | | | | | | | | | | Model No. | Hyper MF | Hyper MF-U | | | | Order No. (mm) | 176-401* | 176-402* | | | | Observation type | BF | BF or BF/BD | | | | | — | — | | | | | 250 x 150mm | 250 x 1 50mm | | | | | | Linear encoder | | | | Resolution | 0.01pm | 0.01pm | | | | Measuring accuracy (at 20°C) | ±(0.9+3L/1000)pm, L = XY axis measuring length (mm) when not loaded | | | | Drive system (X, Y, Z-axis) | Motor-driver control with the joystick | | | | XY stage top size | 460 x 350mm | 460 x 350mm | | | | Effective glass size | 300 x 200mm | 300 x200mm | | | | Swiveling function | ±3° | ±3° | | | | Max. workpiece weight | 30kg | 30kg | | | | Max. workpiece height | 150mm | 150mm | | | | | | | | | | |
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| | | *To denoteyourAC linevoltage add the following suffixes to the order No. (e.g.: 176-401A): A for UL/CSA, D for CEE, E for BS, DC for China, K for EK, No suffix is required for JIS/100V | | |
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| | | Refer to the Hyper MF / MF-U leafiet (E4267) for more details. | | |
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