Catalogue Microscope
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VMU
SERIES 378 — Video microscope Unit
TheVMU is a compact, light-weight, and easy-to-install industrial microscope unit for Ccd camera monitoring in semiconductor fabrications.
FEATURES
• The optical system features ultra-long working distance objectives and correction for the wide range of radiation.
• The fiber-optic reflected illumination keeps the workpiece free from thermal expansion caused by heat. The fiber-optic illuminator is required for the light source.
• Also available with a laser mount or revolving nosepiece (objective mount).
Selection Guide of System Configuration
SPECIFICATIONS
Magnification oftube
1X
Applicable 378-505, wavelength 378-506
Near-infrared and visible radiation
378-507
Near-infrared —visible— near-ul­traviolet radiation
378-508
Visible and ultraviolet radiation
Objective
(Optional)
Reflected illumination
• Terecentric system with aperture stop system
• Fiber-optic illuminator (optional) is required.
Light source
Halogen industrial bulb (21V, 150W) (optional)
Mass
378-505: 570g 378-506: 590g 378-507: 980g 378-508:1010g
Order No.
(Depends on each system configuration)
I 378-505
I 378-506
I 378-507
I 378-508
Vertical CCD camera mount
Horizontal CCD camera mount
Yag laser mount
Fiber-optic illumination unit
M Plan Apo, M Plan Apo SL, G Plan Apo objectives for bright field observation
M Plan Apo NIR, LCD Plan Apo NIR, M Plan Apo NUV and LCD Plan Apo NUV objectives for laser cutting
M Plan UV objectives for laser machining
Refer to the Microscope Unitsleaflet (E4191) for more details.
•: Provided, ▲: Available as optional accessory
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