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| | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | FS-70 SERIES 378 — Microscope Unit for Semiconductor Inspection | | | | | | | | | | FEATURES • The optical system that has originally developed for the best seller FS 60 models was further enhanced for the FS70 models. It is ideal as a microscope unit of a prober station for semiconductors. (All models CE marked.) • The FS70L supports three types of YAG laserwavelength ranges (1064nm, 532nm and 355nm), while the FS70L4 supports two types of wavelength ranges (532nm and 266nm), thus expanding a scope of laser applications, allowing laser-cutting of thin-films used in semiconductors and liquid industrial crystal substrates. However, Mitutoyo assumes no responsibility whatsoever for the performance and/or safety of the laser system used with Mitutoyo industrial microscopes. a careful examination is recommended in selecting a laser-emission unit. | | | | | | • Brightfield, Differential Interference Contrast (DIC) and polarized observations are standard with the FS70Z. The FS70L and FS70L4 do not support the DIC method. • By employing an inward revolver, the long working distance objectives provide excellent operatability. •An ergonomic design with superb operatability: the FS70 employs the erect-image optical system (the image in the field of view has the same orientation as the specimen) and enlarged fine focus adjustment wheel with rubber grip coarse adjustment knob. | | | | | | Technical Data Focus adjustment • Method: With concentric coarse and fine focusing wheels (right and left) • Range: 50mm travel range 0.1mm/rev. for fine adjustment, 3.8mm/rev. for coarse adjustment Trinocular tube Image: Erect image | | | | | | | | | | | | | | Pupil distance: Field number: Tilt angle: Illumination system: | | Siedentopf type, adjustment range: 51 - 76mm 24 0° - 20° (only -TH, -THS models) Reflective illumination for brightfield (Koehler illumination, with aperture 12V100Wfiber optics, non-stepped adjustment), power consumption 150W M Plan Apo-4, M Plan Apo SL, G Plan Apo | | | | | | | | | | | | | | Light source: | | | | | | | | | | Objectives(optional): | | | | | | | | | | | | | | SPECIFICATIONS | | | | | | | | | | | | | | | | | | | | | | | | Model No. Order No. | FS70 378-184-1 | FS70-TH 378-184-3 | FS70Z 378-185-1 | FS70Z-TH 378-185-3 | FS70L 378-186-1 | FS70L-TH 378-186-3 | FS70L4 378-187-1 | FS70L4-TH 378-187-3 | | | | | | | | Short base model No. Order No. | FS70-S 378-184-2 | FS70-THS 378-184-4 | FS70Z-S 378-185-2 | FS70Z-THS 378-185-4 | FS70L-S 378-186-2 | FS70L-THS 378-186-4 | FS70L4-S 378-187-2 | FS70L4-THS 378-187-4 | | | | Focus adjustment | 50mm travel range with concentric coarse (3.8mm/rev) and fine (0.1mm/rev) focusing wheels (right / left) | | | | Image | Erect image | | | | Pupil distance | Siedentopf type, adjustment range: 51 - 76mm | | | | Field number | 24 | | | | Tilt angle | — | 0° - 20° | — | 0° - 20° | - 0°- 20° | — 0°- 20° | | | | Optical pass ratio | 50/50 | 100/0 or 0/100 | 50/50 | 100/0 or 0/100 | 100/0 or 0/100 | 100/0 or 0/100 | | | | Protective Alter | — | — | Built-in laser beam Alter | Built-in laser beam Alter | | | | Tube lens | 1X | 1X-2X zoom | 1X | 1X | | | | Applicable laser | — | — | 1064/532/355nm | 532/355nm | | | | | C-mount (using optional adapter B) | UsealaserwithTVport. | C-mount receptacle (with green Alter switch) | | | | Illumination system, optional | Reflective illumination for bright field (Koehler illumination, with aperture diaphragm) 12V 100Wflber optics, non-stepped adjustment, light guide length: 1.5m, power consumption 150W | | | | Objective, optional (for observation) | M Plan Apo, M Plan Apo SL, G Plan Apo | | | | Objective, optional (for laser-cutting) | — | M/LCD Plan NIR, M/LCD Plan NUV | M Plan UV | | | | Loading weight* | 14.5kg | 13.6kg | 14.1kg | 13.2kg | 14.5kg | 13.6kg | 14.1kg | 13.2kg | | | | Mass (main unit) | 6.1kg | 7.1kg | 6.6kg | 7.5kg | 6.1kg | 7.1kg | 6.6kg | 7.5kg | | | | | | | | | | | | | | | | | | | | Refer to the Microscope Units leaflet (E4191) for more details. | | | | | | | | | | "Loading weight on optical tube excluding weight of objective lenses and eyepieces | | | | | | | | | | | | | | 390 | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | |
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