Text version of the page
Text version of the page
| | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | FS-300 | | | | | | | | | | The FS-300 is designed for inspecting micro-components such as IC chips and video head parts. The optical system features ultra-long working distance objectives, wide view field eyepieces, and independent correction for lateral chromatic aberration. | | FEATURES • The complete system of FS-300 can be composed of a variety of parts for meeting diverse applications. • Available with or without a transmitted illuminator. • Ultra-long working distance objectives provide easy manipulation ofworkpieces. • Easy switching between the bright-field illumination and the dark-field illumination. • Optional accessories widen the range of applications. | | | | | | | | | | Polarized light observation: Observing only the Altered light that vibrates in one direction. Used for observing materials with special optical characteristics, such as mineral and liquid industrial crystal. | | | | | | | | | | | | | | Differential interference observation: Effective in detecting fine scratches and steps on the surface of metal, liquid crystal, and semiconductors. | | | | | | | | | | FS-300 with optional accessories | | | | | | | | | | Dark field observation: Observing only the scattered light by shutting down the direct light to the objectives. The scratches and dust that cannot be viewed in the bright view field can be observed by a high-contrast. | | | | | | SPECIFICATIONS | | | | | | | | | | | | | | | | | | | | | | Main unit | Observation system | Bright field (BF): 378-320, 378-322,378-324, 378-326 Bright/darkfleld (BF/DF): 378-321, 378-323, 378-325, 378-327 | | | | | Reflectedillumination | Koehler illumination With aperture industrial diaphragm (centering mechanism) and field stop 12V/100W halogen lamp (non-stepped brightness adjustment) With Alter mounting slot (2-slot) With BF/DF switching industrial slide (378-321, 378-323, 378-325, 378-327 only) | | | | | Transmittedillumination | 12V/100W fiber illumination (non-stepped brightness adjustment) With aperture diaphragm (378-321,378-323, 378-325, 378-327 only) | | | | | Focus adjustment | With concentric coarse and fine focusing wheels (right and left) Fine adjustment: 0.1mm/rev. for 32mm travel range Coarse adjustment: 3.8mm/rev. for 32mm travel range | | | | Power revolver | Inward type with 4 lens mounts | | | | Workstage | Travel stroke: 356x 306mm with X-/Y-axis fine feed knobs and coarse travel handle | | | | Optical tube | Type | Trinocular tube (erect image) | | | | | Field number | 24 | | | | | Depression angle | Fixed 20°: 378-320, 378-321,378-322, 378-323 Adjustable 0° to 20°: 378-324, 378-325, 378-326,378-327 | | | | | Intermediateimage mag. | 1X | | | | | Optical pass ratio | Siedentopf type, adjustment range: 51 - 76mm | | | | | Pupil distance | Siedentopf type, adjustment range: 51 - 76mm | | | | Eyepiece | Fieldofview | 1OX/03O: 378-320, 378-321, 378-322, 378-323 1OX/024: 378-324, 378-325, 378-326, 378-327 | | | | Applicable objective (optional) | M Plan Apo, M Plan Apo SL, G Plan Apo: 378-320, 378-322, 378-324, 378-326 BD Plan Apo, BD Plan Apo SL: 378-321,378-323, 378-325, 378-327 | | | | Dimensions | Main unit | 360 x803 x 568.5mm | | | | | Workstage | 700 x 400mm | | | | Power supply | 100 to 240VAC, 50/60Hz | | | | Power consumption | Approx. 150W: 378-320, 378-321, 378-324, 378-325 Approx. 300W: 378-322, 378-323, 378-326, 378-327 | | | | Mass | Approx. 50kg including workstage | | | | | | | | | | | | | | Bright field observation: Most common method of observation. Observing directly the light reflected on the surface of workpiece. | | | | | | | | | | Refer to the FS-300 leaflet (E4197) for more details. | | | | | | | | | | | | | | Mitutoyo | | | | | | 389 | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | |
|