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FS-300
SERIES 378 — High Power Inspection microscope
The FS-300 is designed for inspecting micro-components such as IC chips and video head parts. The optical system features ultra-long working distance objectives, wide view field eyepieces, and independent correction for lateral chromatic aberration.
FEATURES
• The complete system of FS-300 can be composed of a variety of parts for meeting diverse applications.
• Available with or without a transmitted illuminator.
• Ultra-long working distance objectives provide easy manipulation ofworkpieces.
• Easy switching between the bright-field illumination and the dark-field illumination.
• Optional accessories widen the range of applications.
Polarized light observation:
Observing only the Altered light that vibrates in one direction. Used for observing materials with special optical characteristics, such as mineral and liquid industrial crystal.
Differential interference observation:
Effective in detecting fine scratches and steps on the surface of metal, liquid crystal, and semiconductors.
FS-300 with optional accessories
Dark field observation:
Observing only the scattered light by shutting down the direct light to the objectives. The scratches and dust that cannot be viewed in the bright view field can be observed by a high-contrast.
SPECIFICATIONS
Main unit
Observation system
Bright field (BF): 378-320, 378-322,378-324, 378-326 Bright/darkfleld (BF/DF): 378-321, 378-323, 378-325, 378-327
Reflectedillumination
Koehler illumination With aperture industrial diaphragm (centering mechanism) and field stop 12V/100W halogen lamp (non-stepped brightness adjustment) With Alter mounting slot (2-slot) With BF/DF switching industrial slide (378-321, 378-323, 378-325, 378-327 only)
Transmittedillumination
12V/100W fiber illumination (non-stepped brightness adjustment) With aperture diaphragm (378-321,378-323, 378-325, 378-327 only)
Focus adjustment
With concentric coarse and fine focusing wheels (right and left) Fine adjustment: 0.1mm/rev. for 32mm travel range Coarse adjustment: 3.8mm/rev. for 32mm travel range
Power revolver
Inward type with 4 lens mounts
Workstage
Travel stroke: 356x 306mm with X-/Y-axis fine feed knobs and coarse travel handle
Optical tube
Type
Trinocular tube (erect image)
Field number
24
Depression angle
Fixed 20°: 378-320, 378-321,378-322, 378-323 Adjustable 0° to 20°: 378-324, 378-325, 378-326,378-327
Intermediateimage mag.
1X
Optical pass ratio
Siedentopf type, adjustment range: 51 - 76mm
Pupil distance
Siedentopf type, adjustment range: 51 - 76mm
Eyepiece
Fieldofview
1OX/03O: 378-320, 378-321, 378-322, 378-323 1OX/024: 378-324, 378-325, 378-326, 378-327
Applicable objective (optional)
M Plan Apo, M Plan Apo SL, G Plan Apo: 378-320, 378-322, 378-324, 378-326 BD Plan Apo, BD Plan Apo SL: 378-321,378-323, 378-325, 378-327
Dimensions
Main unit
360 x803 x 568.5mm
Workstage
700 x 400mm
Power supply
100 to 240VAC, 50/60Hz
Power consumption
Approx. 150W: 378-320, 378-321, 378-324, 378-325 Approx. 300W: 378-322, 378-323, 378-326, 378-327
Mass
Approx. 50kg including workstage
Bright field observation:
Most common method of observation. Observing directly the light reflected on the surface of workpiece.
Refer to the FS-300 leaflet (E4197) for more details.
Mitutoyo
389
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