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FS-110

SERIES 378 — Metallurgical Microscope manufacturer

Optional Accessory

378-856: 10X eyepiece (Field number: 24), 2 pes. /set 378-857: 15X eyepiece (Field number: 16), 2 pes. /set 378-858: 20X eyepiece (Field number: 12), 2 pes. /set 378-851: Extra-wide 10X eyepiece (Field number: 30)* 378-003: Trinocular tube, 1X (Erect image) 378-004: Trinocular tube, 1X (Inverted image) 378-001: Trinocular tube, 1X/2X switchable

(Erect image) 12AAA646: Color Alter (LB80) 12AAA643: Colorfilter(ND2) 12AAA646: Colorfilter(ND8) 12AAA645: Color Alter (Green) 378-031: Reflected illumination unit (Bright/dark field) 378-032: Reflected illumination unit (Bright field) 378-085: Light source unit** 378-013: Revolving nosepiecew/4lens mounts

(B/D field)

378-014: Revolving nosepiece w/ 4 lens mounts (Bright field)

378-015: Revolving nosepiece w/ 5 lens mounts

(Bright field) 378-074: Polarizing unit 378-075: Bright/dark field switching unit 378-021: Workstage (6" x 6"), Right-handed type 378-022: Workstage (6" x 6"), Left-handed type 378-023: Workstage (8" x 8"), Right-handed type 378-024: Workstage (6" x 6"), Left-handed type 514024: Stage glass for 6" x 6" workstage 514025: Stage glass for 8" x 8" workstage 378-051: Wafer holder (3" DIA. - 6" DIA.) 378-055: Mask holder (3" x3") 378-056: Mask holder (4" x 4") 378-057: Mask holder (5" x5") 378-058: Mask holder (6" x 6") 378-059: Mask holder (7" x7") 378-060: Mask holder (6" DIA.) 378-076: Differential interference contrast unit

(100X, SL80, SL50X) 378-078: Differential interference contrast unit

(50X, SL20X)

378-079: Differential interference contrast unit

(20X)

378-080: Differential interference contrast unit (10X, 5X)

378-041: CCDcameramountadapter (See page 394.) Objectives

*Can be used with the special trinocular tube (378-001). "Lightsource: Halogen industrial bulb (12V, 50W)

The FS-110 is designed for inspecting micro-components such as IC chips and video head parts. The optical system features ultra-long working distance objectives, wide view field eye-pieces, and independent correction for lateral chromatic aberration.

FEATURES

• The complete system of FS-110 can be composed of a variety of parts for meeting diverse applications.

• Available without or a transmitted illuminator.

• Ultra-long working distance objectives provide easy manipulation ofworkpieces.

• Easy switching between the bright-field illumination and the dark-field illumination.

• Optional accessories widen the range of applications.

FS-110IR with optional accessories

Eyepiece

SYSTEM DIAGRAM

PCA

Photomicrography


Eye	pieceUWF10x/30	Ey Ey Ey	epleceWF20x/12 epieceWF15x/16 spieceWF 10x/24
Tube
	Erecting trinocular tube 1x/2x, viewfield 30		Inverted trinocular tube View field 24


□		I
oo o o	Ti ^c

SYSTEM DIAGRAM:FS110-IR

Infrared band-pass filte


o	o	o	ÖI
SIO-780-F	SIO-1060-F	SIO-1200-F	SIO-1300-F J

M Plan NiR series objective

Color TV system for infrared rays

□

I Lamphouse (12V, 50W)

" ' i Wafer holder mount 378-055 Mask holder 3" 378-056 Mask holder 4" 378-057 Mask holder 5" 378-058 Mask holder 6" 378-059 Mask holder 6"round 378-060 Mask holder 7"

388