Systems Positioners Mini Positioners Direct Drives Controllers Manual Positioners Accessories Appendix Nano Precision Elevation Stage NPE-200
2.
022 fon +49 (0) 7634 / 50 57 230 F A C T S
Load CharacteristicsFx
(N) Fy
(N) Fz
(N) Mx
(Nm) My
(Nm) Mz
(Nm) k α x
(µrad/Nm) k α y
(µrad/Nm) The Nano-Precision Elevator NPE-200 2Phase-033100803001005010031 is further development of theElevation Stage UPM 160 and offershighest precision. Providing maximumpositioning accuracy and reliability it isan indispensable elevation stage in thefield of Lithography, Fiber Alignmentsand Wafer Sub Surfaces Inspection.Stiffness and smooth move will beachieved by high-quality double crossedroller bearings and a special, stressfreetempered Al-alloy guarantees ahomogeneous non-warping structure. The Nano-Precision Elevator NPE-200 isoffered with 2-phase-micro-step motorwith a backlash free gear head (ratio=50:1).
Travel Range (mm) 13
Key features
Bi-directional Repeatability (µm) +/- 0.0512+/- 0.25*0.00001 ... 0.2+/- 0.7+/- 20+/- 2020.20.00021.2/-8.7
Travel range 13 mm (1/2”)Highest resolution 2nm
Bi-directional repeatability +/- 50 nm
Linear scale centrally mounted Maximum speed 0.2mm/sec Double crossed-roller bearingsStrength stress-relieved aluminium
Load capacity 30 kg
Limit switches integrated
20.000 hour MTBF
Module combination
Accuracy (µm) Velocity Range (mm/sec) Straightness (µm) Pitch (µrad) Yaw (µrad) Ballscrew Pitch (mm) Speed max. (mm/sec)
Technical data 2Phase-033 Resolution Closed–Loop / 1 mm pitch (µm)
01/04 Errors and technical modifications are subject to change LS-040, Linear Zerodur
® scale Nominal Current (Amps) / Voltage range (Volts) 2Phase-033 Weight (kg) Material Special-Alu, black anodized Note: Delivery only with Controllers SMS seriesMore info: Detailed information, concerning motor and connectors, see: Appendix*= Two point slope correction
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