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Systems Positioners Mini Positioners Direct Drives Controllers Manual Positioners Accessories Appendix Ultra Precision Elevation Stage UPL-160

2.

020 fon +49 (0) 7634 / 50 57 230 F A C T S

Load CharacteristicsFx

(N)

Fy

(N)

Fz

(N)

Mx

(Nm)

My

(Nm)

Mz

(Nm)

k α x

(µrad/Nm)

k α y

(µrad/Nm)

The Ultra-Precision-Elevation Stage DC-B-0412001003001754917531 UPL-160 is the logical supplement tothe Ultra-Precision-Linear stages 2Phase-070 2001003001754917531 UPM-160 . Ultra-Precision-ElevationStages of the structural series 160 arespecially developed for the Wafer SubSurfaces Inspection, Fiber Alignments,High Precision Robotic and for all taskswhere maximum positioning accuracyand reliability are absolutely necessary.Due to high-quality double crossed rollerbearings a high stiffness and smoothmove are achieved. A special, stressfreetempered Al-alloy guarantees ahomogeneous non-warping structure.

Travel Range (mm) 26 Bi-directional Repeatability (µm) +/- 0.1+/- 0.25* ... 0.40.001 ... 30+/- 1.5+/- 40+/- 25230250.10.005 ... 0.13.8 | 242.8 | -8.7 Accuracy (µm)

Key features

Velocity Range (mm/sec)

Travel range 26 mm (1”)Bi-directional repeatability +/- 0.1 µmLinear scale central mounted Maximum speed 30 mm/sec Crossed-roller bearings Strength stress-relieved aluminium Load capacity up to 30 kgLimit switches integrated20.000 hour MTBF Module combination

Straightness (µm) Pitch (µrad) Yaw (µrad) Ballscrew Pitch (mm) Speed max. (mm/sec)
Technical data DC-B-041 2Phase-070 Resolution Closed–Loop / 1 mm pitch (µm) LS-010, Linear steel scale LS-020, Linear glass scale
01/04 Errors and technical modifications are subject to change Nominal Current (Amps) / Voltage range (Volts) DC-B-041 2Phase-070 Weight (kg) Material Special-Alu, black anodized More info: Detailed information, concerning motor and connectors, see: Appendix*= Two point slope correction
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