2.

010 fon +49 (0) 7634 / 50 57 230 F A C T S

Load CharacteristicsFx

(N)

Fy

(N)

Fz

(N)

Mx

(Nm)

My

(Nm)

Mz

(Nm)

k Î± x

(µrad/Nm)

k Î± y

(µrad/Nm)

The Ultra-Precision-Linear Stage DC-B-04115010035010020010053 UPM-160 of the structural series 160 2Phase-051 15010035010020010053 is especially developed for the WaferSub Surface Inspection, FiberAlignments, High Precision Robotic andfor all tasks where a maximum ofpositioning accuracy and reliability isabsolutely necessary. All Ultra-Precision-Linear stages UPM-160 are equippedwith a linear length linear system that iscentrally installed between the guide.Due to high-quality crossed-roller bearingsa maximum of load capacity and smoothmove is guaranteed. A special, stressfree,tempered Al-alloy guarantees ahomogeneous non-warping structure.

Travel Range (mm) 55 105 155 205 Bi-directional Repeatability (µm) +/- 0.1+/- 0.25*0.001 ... 120+/- 0.5+/- 15+/- 202.5 I 5.050 I 12020 I 400.10.005 ... 0.13.8 | 242.5 | -5Special-Alu, black anodized Accuracy per 50 mm (µm) Velocity Range (mm/sec) Straightness / Flatness (µm) < +/- 0.75< +/- 20 6 < +/- 1< +/- 25 7 < +/- 1.25< +/- 30 8 Pitch (µrad)

Key features

Yaw (µrad) Ballscrew Pitch (mm)

Travel range up to 205 mm (8”)Bi-directional repeatability +/- 0.1 µm Linear scale centrally mounted Maximum speed 100 mm/secCrossed-roller bearingsStrength stress-relieved Aluminium Load capacity up to 35 kg 20.000 hour MTBF Module combination

Speed max.2.5 I 5.0 mm pitch (mm/sec)
Technical data DC-B-041 2Phase-051 Resolution Closed–Loop / 1 mm pitch (µm) LS-010, Linear steel scale LS-020, Linear glass scale
11/03 Errors and technical modifications are subject to change Nominal Current (Amps) / Voltage range (Volts) DC-B-041 2Phase-051 Weight (kg) Material More info: Detailed information, concerning motor and connectors, see: Appendix*= Two point slope correction

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