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X-Ray Diffraction and Topography Positioning system for High-Vacuum10-7 torr. The 4-axes positioning systemwas especially developed for the vacuum10-7 torr. The system has a common pivotpoint. In all components vaccum suitablegrease is used. The industrial manipulators are drivenby vacuum motors of PHYTRON. Thealuminum parts are not anodized. Thesystem is controlled by the 4-axespositioning controller SMC-Corvus. OEM Application for UV-Laser The miniature Micro Stage MTS-70 was developed for vacuum applicationwith limited space conditions. The driveis made by a special micro step motorwithout gear. For need of high positioningaccuracy and repeatability (0.1 µm) theMicro Stages
VACUUM 01/04 Errors and technical modifications are subject to change MTS-70 are offered with alinear measuring system. An optimalperformance of the compatibility isachieved by using our SMC or NIcontrollers.
Contact us via Internet http://www.micos.ws

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