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Air Bearing Stage made of Glass Homogeneous, high-precise, air-bearing xy stage with direct drive forprocessing nano structures in SemiConductor-, LCD- and Flat PanelIndustries.The positioning system wasespecially developed to meetrequirements of highest accuracy. Baseand guiding elements were especiallydesigned in a glass ceramic sandwichstructure. In order to achieve maximumof accuracy special air bearinggeometries have been developed. Theposition measuement in x and y directionis made by a laser interferometer which iscoupled at the two mirrors on the industrial slide.Drive is made by linear motors. Thepositioning system works contactless andtherefore allows a maximum of accuracyand process stability.

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