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Calibration and Measurement of CCD-Chips The system serves for the measurement and thecalibration of CCD-Chips with high resolution.This 3-axes positioning system consists of oneRotation Stage DT-120 and two Linear stages of theseries MT-90.All components are equipped with high-qualitymeasurement systems. The rotary resolution is 5 arsec.,the translation resolution is 0.1 µm. The repeatability ofthis system is more than 1 µm and the accuracy of thecomplete system is 6 µm. Surface Topography of Solar Cells The 3-axes positioning system works in an opaquechamber. The substrate is positioned 102 mm in X andY. The travel range of the sensor is 25 mm. Allpositioning axes offer a high resolution of more than1 µm. The repeatability is 0.5 µm. An important featureof this positioning system is the very smoothmovement. The solar cells are precisely positioned andfixed. A SMC-Corvus controller is used for the drive.MICOS developed customized command andinterpretation software.

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