4.

004 fon +49 (0) 7634 / 50 57 230 F A C T S

Load CharacteristicsFx

(N)

Fy

(N) (Peak)(Cont.)

Fy

(N)

Fz

(N)

Mx

(Nm)

My

(Nm)

Mz

(Nm)

k Î± x

(µrad/Nm)

k Î± y

(µrad/Nm)

The Ultra Precision Stage UPS-150 of the structural LM-01575882215050100502520 series 150 , the follow-up model to UPM-160, isespecially employed for the Wafer Sub SurfaceInspection, Fiber Align-ments, High Precision Robotic andfor all tasks where a maximum of positioning accuracyand reliability is absolutely necessary. All Ultra PrecisionStages UPS-150 are equipped with a linear measuringsystem that is centrally installed between the guide. Dueto high-quality crossed-roller bearings a maximum of loadcapacity and smooth move is guaranteed.

Travel Range (mm) 55 105 155 205 305 Bi-directional Repeatability (µm) +/- 0.1+/- 0.25**0.001 ... 600< +/- 0.5< +/- 15< +/- 206000.10.005 ... 0.1center15.36.63110.90.37124.7Special-Alu, black anodized Accuracy per 50 mm (µm) Velocity Range (mm/sec) Straightness / Flatness (µm) < +/- 0.75< +/- 20 5.5 < +/- 1< +/- 25 6.3 < +/- 1.25< +/- 30 7.1 < +/- 1.75< +/- 40 8.7 Pitch (µrad) Yaw (µrad) Speed max. (mm/sec)

Key features

LM-015

Linear motor Travel range up to 305 mm (12“)Long-time stability Smooth runningRepeatability +/- 0.1 µmLinear scale centrally mounted Maximum speed 600 mm/sec Crossed-roller bearings Strength stress-relieved aluminum Load capacity up to 15 kg 20.000 hour MTBFModule combination

Technical data Resolution Closed–Loop (µm) LS-010, Linear steel scale LS-020, Linear glass scale Reference mark Winding Constant Force constant (Nm/Arms) Motor constant (N/ âˆš W) Continuous Force (N) Back EMF constant V/(m/s)*
01/04 Errors and technical modifications are subject to change Electrical time constant (ms)* Electrical inductance (mH)* Continuous current (Arms) Weight (kg) Material Note: *Terminal to terminal ** Two point slope correctionMore info: Detailed information, concerning motor and connectors, see: Appendix

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