Gas Delivery Equipment Gas Containment & Distribution 276

SEMI-GAS

Centurion

Gas Source Panels/Manifolds

Matheson Tri-Gas’ SEMI-GAS
® Gas Source Panels/Manifoldspioneered specialty gas handling technology over 20 years ago. Today, these panels continue to deliver the safety, performance and reliability required in the most advanced semiconductor production and R&D environments. Matheson Tri-Gas now has one of the largest installed bases of gas handling equipment worldwide.
GasDeliveryEquipment

Engineered to Outperform

Gas Source Panels are engineered to deliver the performancerequired in the manufacturing of the most advanced electronic devices. This is achieved by a streamlined gas flow path with minimized internal volume and unswept space. In addition, only field proven components manufactured from electropolished 316Lstainless steel are utilized. Whether the gas is toxic, flammable, corrosive or inert, Matheson Tri-Gas has a gas source panel that will deliver the highest process purity, improving product performance and reducing the overall cost of ownership.

Reliability Built In

With the high cost of downtime, Matheson Tri-Gas recognizes the need for a gas source panel that requires minimal maintenance. Because of this need, Gas Source Panels are engineered for long- term performance. At Matheson Tri-Gas’ ISO 9001 certified facility, panels are assembled using only qualified components in a cleanroom environment. As part of a comprehensive quality assurance program, each panel is rigorously tested for proper performance, first at the component level, then on the panel, and finally after installation in the cabinet.In the field, Matheson Tri-Gas’ SEMI-GAS
® Gas Source Panelshave the best reliability record in the industry. Components are clearly labeled and easily accessible from the front panel for improved serviceability. In addition, the modular design reduces sparepart stocking requirements and makes adding options easy.
TM GasSource Manifold represents the next generation of ultra puregas source manifolds designed specifically for use in submicron fabrication environments. Utilizing springless diaphragm valves, industrial pressure transducers, andtied diaphragm regulators, the CENTURION

Features and Benefits

•Compact and efficient internal flow path minimizes dead spacefor consistent, repeatable, high purity operation.•Automatic switchover capability provides critical redundancyand guaranteed uptime.•Vacuum venturi – assisted purging provides quick and efficientevacuation of the manifold.•Front removable components simplify maintenance. •Continuous purge gas bleed during cylinder changes preventsatmospheric contamination of the pigtail.•Modular design reduces lead times and spare part stockingrequirements and makes adding options easy.•Leak tested and certified to <1x10
TM Manifold isengineered to eliminate contamination of the source supply of specialty gases. An in-line architecture, unique to Matheson Tri-Gas, and a compact modular design reduce the dead space volume compared to other high-purity manifold configurations. The result is a manifold with excellent purge efficiency providingmaximum protection for both your operators and your processes.The CENTURION
TM Gas Source Manifold design is ideal forsupplying speciatly gases to process tools that manufacture the most challenging nanotechnology applications. The system is available in a variety of process-specific configurations. •Auto-Purge Manifolds designed for flammable, toxic, pyrophoricor corrosive HPM gases. •Safety protected manual manifolds with Emergency Shutofffeatures for lower cost HPM applications.. •Manual and Auto-Purge Manifolds for inert process gases.
-9 sccs•Isolated electronic components •All orbital automated butt-welded construction •Opposing pigtail brackets to prevent the transmission of force tothe VCR connection•Excess flow protection •Emergency Shutoff Valve (ESO) for all HPM applications •Intuitive designs reduce the potential for operator error With ever smaller line width challenges in the electronicsindustries, gas purity is paramount. The CENTURION

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