Positioning Stage XY 35/35 GL - LPKF Laser & Electronics - #1

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LPKF Motion & Control GmbH Mittelbergstraße 17 D 98527 Suhl fon: + 49 36 81 / 89 24-0 fax: + 49 36 81 / 89 24-44 mail: info@lpkf-mc.de internet: http://www.lpkf-mc.de LPKF-Products Adaptation to OEM and specific applications is made in consultation with the customer. A report compiled by laser-interferometer gives a precise statement of the guiding and positional accuracy. Parameters Data Range of travel XY: Measuring system accuracy: Yaw and pitch angles: Max. speed: Internal resolution: Repetition accuracy: Additional mass: Total weight: Temperature conditions: • Change with time Air humidity: Compressed air supply: • Residual oil content: • Solid particles: • Moisture: Air consumption: 350 x 350 mm2 linear: ± 3 ìm/m 350 mm/sec 0,05 ìm ± 0,5 ìm 2 sec und 4 sec centric ca. 20 kg 1,1 x 1,1 x 0,9 m ca. 1,2 t 20°C ±0,5°C max. 0,5°C / h max. 60 % controlled 7,0 bar ± 0,1 bar < 7 mg/m3 < 3ìm 5,953 g/m3 ca. 1100 l/h Max. acceleration: 1 g Min. settable step length: 0,625 ìm Area needed for installation LxWxH: Präzisionsantriebe / Precision Drives Steuerungen / Control Systems / Software Meßtechnik / Measurement Engenieering Sondersysteme / Special Systems Tecnical Parameter Positioning Stages XY 35/35 GL Positioning Stage XY 35/35 GL Highest accuracy over 350 x 350 mm2 Precision Drives X-Y Stage with air-bearings and linear motors for highly dynamic positioning and measuring tasks in the micrometer range