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| Microwave systems for advanced, low temp thermal processing of next generation semiconductors! | Vacuum 3700 By Lambda Technologies | ||
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| Features | |||
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| Advanced Var\ab\e Frequency Microwave (VFM) source provides uniform, S\ wafer safe heating Vacuum chamber w\th env\ronmenta\ contro\s Ag\\e contro\ architecture for precise open or c\osed \oop contro\ of energy transfer F\ex\b\e \nterface design for embedding \nto process too\s or manufacturing ce\\s Applications & Benefits • Rap\d and \ow temperature cure of pass\vat\on and d\e\ectr\c coatings • Faster therma\ stab\\\zat\on for Cu and H2 annea\ processes • Low-k d\e\ectr\c annea\\ng • S\LK annea\\ng • Photoresist bake and ref\ow • Rad\ca\ Oxidation and n\tr\dat\on • \J\tra Low Temperature LPCVD (M\tr\de) • J\tra Th\n Gate D\e\ectr\c • Less t\me at temperature as we\\ as se\ect\ve heating work to reduce stress and provide for a w\der range of mater\a\ choices • Reduced heating t\me a\so saves on an assemb\\es' va\uab\e therma\ budget a\\otment • Less \Nork \n Process (\N\P) reduces \oss \ncurred \n cases when unschedu\ed production \\ne stoppages occur • VFM requires \ess energy and f\oor space | MCZWO configured with 2KW HPA for higher power applications | ||
| About Lambda Lambda Technologies has pioneered the application ofVariable Frequency Microwave heating for materials processing. We develop and sell microwave process tools and provide microwave process development assistance. | |||
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| Precise Temp Control | |||
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