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| Lambda | |||||
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| 4 | Modular System ,,, providss flexibility and cast effective packaging for vane-Jy | DiamoTek 1800 915 MH? *T Star - 30ft w pOrtmf 1-10 Tttlcfana fftr depo rate 20 ■ £Q& toff process corwtowrs Options tfip*iJcfe' - Tlnrfco ptAtrp - Slags bta& | |||
| pomih Em | |||||
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| System Computer Controls provide tarn-key Ofiaf'ittion with conwiete recipe control of the depos tion process | |||||
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| Internal Tuning of Resonant Cavity Malniains Optimum Plasma Conditions o Ensures precise plasnja controt o Produces high-density piasnta dissociation o Enabl&s tffj/femi temp distribution o Allows tdss of state up to iargv aroa processing ' Unifa bXTiW^Ib~n jJcUTUn j"lLl.. EJl>-L-|llipLL" ±!!H!lr L1 fl I i-H m 11 | |||||
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