DiamoTek 1200-ECR - LAMBDA Technologies - #2

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Lambda
Technologies DiampT^k Series: Microw&ve Plasma Systems for GVD Diamond
DiamoTek 12QQ-ECR Specifications
- FuSfy automated recipe control
- 2.45 GHz at 1.2kw - 6kw power -10 inch discharge diameter -6 to 8 inch uniformetch ares
- 4 MFC standard
- Adjustable tuner plate
- Adjustable launch probe
- Adjustable stage height
- Permanent EGR magnets
- Turbo-pumping & hhv&c seais
Systern Computer Controls provide ium-key operation with Gomplete recipe control yf the cfopos^cy] process
Muiti-poiar permanent EC Ft magnets with p)3$m& disc for uniform high density discharge
JWopuiarSystem _., provirff?s fiejtibitit^ Hid co&> effective packaging far variefy cf options artrf pmcejig stpj]rtr^fj0£hj
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pageCatalog pdf di En 2012-02-07-14