Catalogue - KOFLOC MFC 3200 - Kofloc

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Digital flow-meter, Mass flow controller, Thermal mass flow-meter, Thermal mass flow controller, Mass flow-meter

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High-grade Mass Flow Controller

MODEL 3200 series

Model 3200 Series Mass Flow Controller is an advanced model designed as a successor of the 3910 Series that enjoys a wide use for diverse applications such as manufacture of semiconductors, LCDs, combustion equipment, analytical devices, and biotechnology fields. Its high performance is equal to a new standard of KOFLOC.

Features

Skofloc 3200

• Equipped with a temperature follow-up type current difference detection flow sensor (patent applied for) to ensure high accuracy and high-speed response

• Use of a normally closed valve to ensure safety

• Can be used for control of various types of gases thanks to the incorporated CF switching feature.

• Reduced dead volume thanks to the diaphragm seat valve

• Control of small quantities of flows available up to 1 SCCM full scale (SR option)

• Low differential pressure type control available for combustible gases (LP option)

Standard Specifications

Dimensions


	Flow range (at N2 calibration conditions)	10SCCM-20SLM
	Valve type	Normally closed, Solenoid, Diaphragm seat valve
	Control range	2%-100%F.S.
	Response	1 sec. or less to within ±2% of full scale of final value typical for 0-100% response
	Accuracy	Within ±1.0% F.S.
	Linearity	Within ±0.5% F.S.
	Repeatability	Within ±0.2% F.S.
	Operating differential pressure	F.S.<5SLM 49kPa-294kPa * Low differential pressure specification depends on types of gas and flow rates to be used.
	Operating differential pressure	5<F.S.<20SLM 98kPa-294kPa
	Proof pressure	980kPa
	Leak rate	1x10^-8 Pa-mVs or less
	Working temperature range	0-50°C (Accuracy guarantee: 15-35°C)
	Materials of parts in contact with gases	Body: SUS 316L
		Diaphragm: SUS 316
		Valve seat: PTFE
		Seals: Viton® (Optional: Neoprene® or NBR)
	Joint	Standard: 1/4SWL®
	Joint	Optional: 1/8SWL®, 1/4VCR®, Rc 1/4, etc.
	Electrical connections*	Dsub 9-pin male connector per KFC standard (SEMI standard)
	Flow rate input signals	0-5VDC
	Flow rate output signals*	0-5VDC
	Required power supply *	+15VDC (±5%) 100mA, -15VDC (±5%) 200mA

Bkofioc

3200


	Joint	Dimension L (mm)
	1/4 Swagelok®	127.4
	1/8 Swagelok®	122.8
	1/4 VCR®	123.8
	Rc 1/4	102

Ordering

Option

1 Option name

NR-Neoprene seal SR-1SCCM/5SCCM LP-Low differential pressure specification

' 1/4SWL:1/4Swagelok® 1/8SWL:1/8Swagelok® 1/4VCR:1/4VCR®

, 1/4:1/4RC

Joint

Harness Layout

model 3200

1/4swl

CD +J CU L_

■g

1/8swl 1/4VCr| 1/4

Option name

Pin Assignment of Dsub 9-pin Connector per KFC Standard


Pin No.	Signal	Pin No.	Signal
1	Input valve open/close operation	CD	Flow input Hi
2	Flow output 0-5 V	7	Flow output COM
3	+15 VDC Power source	CO	Flow input Lo
4	Power source COM	CT)	NC
5	-15 VDC Power source

Illustrative example

3200

1/4SWL

1SLM

model

Refer to "Ordering" and "Illustrative Example" when placing an order or requesting a quotation. Fill in the blanks in the "Order/Quotation Request Card" at the end of the catalog, and send the card by fax.

Because a differential input system is used for the product, pin 4 (Power source COM) and pin 7 (Flow output COM) are connected inside the mass flow controller while pin 8 (Flow input Lo) is isolated. In case of a single-ended connection, connect pin 8 to pin 4.

20 Bkgfldc

KOFLOC MFC 3200 - Kofloc - #1

Digital flow-meter, Mass flow controller, Thermal mass flow-meter, Thermal mass flow controller, Mass flow-meter