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S540 Power Semiconductor Test System

S540 Power Semiconductor Test System
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S540 Power Semiconductor Test System - 1

S540 Power Semiconductor Test SystemDatasheet Key Features • Automatically perform all wafer-level parametric tests on up to 48 pins, including high voltage breakdown, capacitance, and low voltage measurements, in a single probe touch-down without changing cables or probe card infrastructure • Perform transistor capacitance measurements such as Ciss, Coss, and Crss up to 3 kV without manual reconfiguration of test pins • Achieve low-level measurement performance in a high-speed, multi-pin, fully automated test environment • Linux-based KTE (Keithley Test Environment) system software for easy test development and fast execution • Ideal for fully- or semi-automatic applications in Process Integration, Process Control Monitoring, and Production Die Sort • Lowers the cost of ownership by minimizing test time, test set-up time, and floor space while achieving lab-grade measurement performance The Keithley S540 is a fully-automated, wafer-level parametric test system that can perform all high voltage, low voltage, low current, and capacitance tests up to 3kV in a single probe touch-down to maximize productivity and minimize cost of ownership. The system safely and seamlessly integrates Keithley’s industry-leading measurement instrumentation with both low- and high-voltage switching matrices, cabling, probe card adapters, prober drivers, and KTE test software. The end result is a customizable 12 to 48 pin parametric test system that eliminates the need to re-configure the test setup or use two separate test systems when moving from high voltage to low voltage tests, enables fully automated 2-or 3-terminal transistor capacitance measurements, and delivers sub-pA level measurement performance. Complete, Single-pass Parametric Testing up to 3 kV The S540 is optimized for use in environments with a broad mix of products, and can be configured as a 12, 24, 36, or 48 pin system. There are two main configurations: The basic high voltage configuration has 12 pins, while the high voltage / low current configuration has 12 pins of high voltage and up to 36 pins of low current. Both configurations support multiple SMU (Source Measure Unit) channels, two- and three-terminal capacitance measurements, differential voltage measurements, as well as pulse and frequency measurements. All test pins connect to a single probe card, therefore enabling all tests to be performed in a single probe touch-down to maximize productivity and minimize cost of ownership.

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S540 Power Semiconductor Test System - 2

HV Chuck Block diagram of the 12 pin High Voltage S540 Configuration. Block diagram of the 12 to 48 pin High Voltage / Low Current S540 Configuration. Fully Automated, Two- and Three-terminal Capacitance Measurements up to 3 kV In addition to the typical 2-terminal capacitance measurements performed in fully automated production applications, the S540 can also perform 3-terminal transistor capacitance measurements typically found in semi-automatic R&D and process integration applications. Testing can be done at bias voltages up to 3 kV and at frequencies up to 1 MHz. The S540 performs these...

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S540 Power Semiconductor Test System - 3

S540 Power Semiconductor Test System High-Speed, Low-Level Measurement Performance As the efficiency of today’s power semiconductor designs increases, device leakage currents and on-resistances are being driven lower and lower. The S540’s low current subsystem, based on Keithley’s proven SMU instrument technology, provides sub pA current measurements at high voltage bias to support measurement of low current characteristics such as off-state leakage, gate leakage, sub-threshold leakage, and more. An optional high resolution digital multimeter (DMM) enables precise, micro-ohm level Rds-on...

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S540 Power Semiconductor Test System - 4

3 kV Probe Card and Probe Card Adapter (PCA) Solutions Making reliable high voltage measurements in multi-pin, fully automated production test applications present numerous challenges, including environmental, device layout, and probe design. Keithley has two qualified solutions for probing up to 3 kV while maintaining low-level measurement performance: The Keithley 9140 and the Celadon 45E. In addition, to simplify probe card mounting and dismounting, we offer the inTEST top loading probe card interface as a factory-installed option. Celadon High Voltage VC20™ and 45e Interface Quick...

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S540 Power Semiconductor Test System - 5

S540 Power Semiconductor Test System Configuration Guide

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S540 Power Semiconductor Test System - 6

Pulse Measurements System Specifications - Valid to the end of the Keithley or Celadon PCA Calibration Cycle 1 year 6 TEK.COM

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S540 Power Semiconductor Test System - 7

S540 Power Semiconductor Test System SMU (Source Measure Unit) Specifications HV SMU (Keithley 2657A) Operating Range.

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S540 Power Semiconductor Test System - 9

S540 Power Semiconductor Test System Low Voltage SMU (2636B) through Low Current Matrix Notes 1. Measurement of Crss requires guarding of the source. With a production system, the effectiveness of guarding is limited above 100 kHz. Measurements of Ciss and Coss do not require guarding.

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S540 Power Semiconductor Test System - 10

Cabinet Size 60.0 cm wide x 91.5 cm deep x 190.5 cm high Software KTE 5.7. Includes wafer descrition, test macro development, test plan development, limit setting, test data management, user access points, and system diagnostics Probe Cards Keithley, Celadon, User Supplied EMC Complies with the European Union EMC Directive Safety Complies with the European Union Low Voltage Directive Support Services Contracts available for probe station integration, calibration, repair, test plan migration, and correlation studies Note: All specifications are subject to change without...

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S540 Power Semiconductor Test System - 11

Find more valuable resources at TEK.COM Copyright © Tektronix. All rights reserved. Tektronix products are covered by U.S. and foreign patents, issued and pending. Information in this publication supersedes that in all previously published material. Specification and price change privileges reserved. TEKTRONIX and TEK are registered trademarks of Tektronix, Inc. All other trade names referenced are the service marks, trademarks or registered trademarks of their respective companies. 103117.SBG 1KW-60909-1 European toll-free number. If not accessible, call: +41 52 675 3777

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