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S530 Semiconductor Parametric Test Systems

S530 Semiconductor Parametric Test Systems
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S530 Semiconductor Parametric Test Systems - 1

table.main {} tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:5.00pt "Arial", sans-serif; } .font1 { font:6.00pt "Arial", sans-serif; } .font2 { font:7.20pt "Arial", sans-serif; } .font3 { font:8.40pt "Arial", sans-serif; } .font4 { font:19.80pt "Arial", sans-serif; } .font5 { font:20.30pt "Arial", sans-serif; } .font6 { font:36.00pt "Arial", sans-serif; } .font7 { font:8.00pt "Palatino Linotype", serif; } .font8 { font:19.00pt "Times New Roman", serif; } S530 system configuration options Customizable for low current and high voltage applications Օ Upto8SMUs Up to 60 pins Օ Full Kelvin measurement (remote voltage sense) option for enhanced measurement accuracy C-V meter (up to 2MHz) Օ Model 9139A Probe Card Adapter Compliant with industry standards S530 systems include a rich set of production qualifications, including built-in diagnostics, system specifications to the probe card, and compliance with all key semiconductor production standards, including CE (EU safety and health and environmental requirements), Semi S2 (safety guidelines for semiconductor manufacturing equipment), and S8 (safety guidelines for ergonomics/ human factors engineering). Comprehensive system diagnostics for long-term reliability Built-in systems diagnostics verify overall system functionality quickly and easily. They include configuration verification, communications pathway tests, signal pathway testing, probe card adapter (PCA), and SMU source-measure tests. The diagnostics process can detect and localize a wide range of system problems, speeding troubleshooting and ensuring long-term reliability and system uptime. Installation, maintenance, and calibration services Keithley's worldwide network of service and applications professionals can offer expert support services ranging from initial installation and probe station integration to test plan migration, repair, and calibration services. Service contracts are available to maximize system utilization and uptime while minimizing your long-term cost of ownership. Your Keithley representative can provide details on services and contracts. Your next step To learn more about how the S530 can help your fab test more cost-effectively and adapt quickly to changing test requirements, visit our website at www.keithley.com and download a data sheet, complete system specifications, or other product literature. Call us toll free at 1-888-KEITHLEY (534-8453) (US only) or contact your local Keithley sales office (listed below) and ask to speak with one of our parametric test specialists. S53 Semiconductor Parametric Cost-effective, high through Test Syste put solutions Spcifications are subject to change without notice. All Keithley trademarks and trade names are the property of Keithley Instruments, Inc. All other trademarks and trade names are the property of their respective companies. keithley A GREATER MEASURE OF CONFIDENCE KEITHLEY INSTRUMENTS, INC. ■ 28775 AURORA RD. ■ CLEVELAND, OH 44139-1891 ■ 440-248-0400 ■ Fax: 440-248-6168 ■ 1-888-KEITHLEY ■ www.keithley.com BELGIUM CHINA FRANCE GERMANY Sint-Pieters-Leeuw Beijing Saint-Aubin Germering Bangalore Ph: 02-3630040 Ph: 86-10-8447-5556 Ph: 01-64532020 Ph: 089-84930740 Ph: 080-26771071,-72, -73 Fax: 02-3630064 Fax: 86-10-8225-5018 Fax: 01-60117726 Fax: 089-84930734 Fax: 080-26771076 info@keithley.nl china@keithley.com info@keithley.fr info@keithley.de support_india@keithley.com www.keithley.nl www.keithley.com.cn www.keithley.fr www.keithley.de www.keithley.com ITALY JAPAN KOREA MALAYSIA NETHERLANDS Peschiera Borromeo (Mi) Tokyo Seoul Penang Son Ph: 02-5538421 Ph: 81-3-5733-7555 Ph: 82-2-574-7778 Ph: 60-4-643-9679 Ph: 0183-635333 Fax: 02-55384228 Fax: 81-3-5733-7556 Fax: 82-2-574-7838 Fax: 60-4-643-3794 Fax: 0183-630821 info@keithley.it info.jp@keithley.com keithley@keithley.co.kr sea@keithley.com info@keithley.nl www.keithley.it www.keithley.jp www.keithley.co.kr www.keithley.com www.keithley.nl SINGAPORE SWITZERLAND TAIWAN UNITED KINGDOM Singapore Zurich Hsinchu Theale Ph: 65-6747-9077 Ph: 044-8219444 Ph: 886-3-572-9077 Ph: 0118-9297500 Fax: 65-6747-2991 Fax: 044-8203081 Fax: 886-3-572-9031 Fax: 0118-9297519 sea@keithley.com info@keithley.ch info_tw@keithley.com info@keithley.co.uk www.keithley.com www.keithley.ch www.keithley.com.tw www.keithley.co.uk © Copyright 2011 Keithley Instruments, Inc. Printed in the U.S.A. No. 3106 06.29.

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S530 Semiconductor Parametric Test Systems - 2

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