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6487 Picoammeter/ Voltage Source

6487 Picoammeter/ Voltage Source
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The 5½-digit Model 6487 Picoammeter/Voltage Source improves on the measurement capability of the award-winning Model 6485, and adds a high resolution 500V source. It provides higher accuracy and faster rise times than the 6485, as well as a damping function for use with capacitive devices. With eight current measurement ranges and high speed autoranging, this costeffective instrument can measure currents from m 20fA to 20mA, take measure ents at speeds up to 1000 readings per second, and source voltage from 200µV to 505V. • 10fA resolution • 5½-digit resolution • <200µV burden voltage • Alternating Voltage method ohms measurements • Automated voltage sweeps for I-V characterization • Floating measurements up to 500V • Up to 1000 readings/second • Built-in Model 486 and 487 emulation mode • IEEE-488 and RS-232 interfaces • Analog output • Digital I/O The Model 6487’s 10fA resolution, superior sensitivity, voltage sweeping, and Alternating Voltage resistance measurements make it well suited for characterizing low current devices. Using the latest current measurement technology, it is significantly less expensive than other instruments p that erform similar functions, such as optical power meters, tera-ohmmeters, competitive picoammeters, or user-designed solutions. With a price that’s comparable to a high-end DMM, the Model 6487 makes picoamp-level measurements affordable for virtually any laboratory or production floor. Low Voltage Burden and Higher Accuracy While DMMs typically employ shunt ammeter circuitry to measure current, the Model 6487 is a feedback picoammeter. This design reduces voltage burden by several orders of magnitude, resulting in a voltage burden of less than 200µV on the lower measurement ranges. The low voltage burden makes the Model 6487 function much more like an ideal ammeter than a DMM, so it can make current measurements with high accuracy, even in circuits with very low source voltages. Successor to the Model 487 The Model 6487 builds on the strengths of one of Keithley’s most popular picoammeters, the Model 487, offering an additional 20mA measurement range, as well as much higher measurement speeds, up to 1000 readings per second. It simplifies device characterization with built-in voltage sweeping capability and the Alternating Voltage method for high resistances. A time-stamped 3000-reading data buffer provides minimum, maximum, and standard deviation statistics. A built-in emulation mode makes it possible to control the Model 6487 with any custom code written to control the Model 487. Current Ranges Voltage Burden Reading Rate Voltage Sweeps Alternating Voltage Ohms Analog Output Storage Buffer Best V Source Resolution Features that Expand Test and Measurement Flexibility • Direct resistance measurements. Optimized for resistances from 50W to 5×1014W using the Source Voltage/Measure Current method. • Alternating Voltage method resistance measurements. This method improves resistance measurements on devices with high background current or high noise. It extends the measurable resistance range up to 1016W. • 500V overload protection. This high overload protection and a robust design let the Model 6487 tolerate abusive overflows, including accidentally shorting the voltage source directly into the ammeter. 1.888.KEITHLEY (U.S. only) www.keithley.com A Greater Measure of Confidence Measures low currents and high resistances quickly, accurately, and economically Picoammeter/ Voltage Source LOW LEVEL MEASURE & SOURCE Measures low currents and high resistances quickly, accurately, and economically

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Ordering Information 6487 Picoammeter/ Voltage Source Accessories Supplied CA-186-1B Ground Connection Cable, Banana to Screw-Lug CAP-31 Protective Shield/ Cap (3-lug) CS-459 Safety Interlock Plug 7078-TRX-3 Low Noise Triax Input Cable, 1m (3 ft) 8607 High Voltage Banana Cable Set for Voltage Source Output APPLICATIONS • Resistance/resistivity measurements Picoammeter/ Voltage Source • Rear panel triax input. This allows the picoammeter to be used in floating operation, up to 500V. When not floating, the addition of a triax to BNC adapter allows inexpensive, easy-to-use BNC cables to be...

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Monitoring and Control of Focused Ion Beam Currents In semiconductor fabrication, focused ion beam systems are often used for nanometer-scale imaging, micromachining, and mapping. Careful monitoring of the magnitude of the beam current with an ion detector is critical. The ion detector generates a secondary current that’s proportional to the current of the primary ion beam. When this secondary current is measured, it can be used to control the intensity of the primary beam. However, this secondary current is very low, often just a few picoamps, so the instrumentation measuring it must...

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Picoammeter/ Voltage Source Typical Analog 5½ Digit Accuracy (1 Year) 1 Rise Time (10% to 90%) 3 Default ±(% rdg. + offset) Typical Damping4 Range Resolution 18°–28°C, 0–70% RH RMS Noise 2 Off On 2 nA 10 fA 0.3 % + 400 fA 20 fA 4 ms 80 ms 20 nA 100 fA 0.2 % + 1 pA 20 fA 4 ms 80 ms 200 nA 1 A p 0.15% + 10 pA 1 pA 300 µs 1 ms 2 µA 10 pA 0.15% + 100 pA 1 pA 300 µs 1 ms 20 µA 100 pA 0.1 % + 1 nA 100 pA 110 µs 110 µs 200 µA 1 nA 0.1 % + 10 nA 100 pA 110 µs 110 µs 2 mA 10 nA 0.1 % + 100 nA 10 nA 110 µs 110 µs 20 mA 100 A n 0.1 % + 1 µA 10 nA 110 µs 110 µs TEMPERATURE COEFFICIENT:...

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