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Engineering recommendations backed up
Compact design Relative suitability of Reali-Slim bearing materials for various operating conditions The space-saving design of Reali-Slim bearings allows you to engineer rotating devices that are smaller, simpler and lighter. >
A Precision tolerances Reali-Slim bearings are manufactured in a range of classes for optimal precision and design fl exibility. >
Race Materials Resistance B Load CapacityHigh Temp. CapabilityChemical C AISI 52100 steel— 1 3 5Martensitic CRES 2 1 2 3
Precipitation CRES 1 2 4 1 Temperature Limits Vacuum compatibility Kaydon can provide off-the-shelf bearings suitable for temperatures up to 250° F. With a wide selection of materials and lubricants available, alternative materials may permit even higher operating temperatures. Standard bearings are intended for atmospheric conditions. Vacuum levels of 10 >
Ball MaterialsResistance B Load CapacityHigh Temp. CapabilityChemical C High carbon — 2 3 5Martensitic CRES 3 2 3 3
Glass 2 4 5 2Ceramic1111 A Lower numbers are better than higher numbers. B Endurakote ® corrosion-resistant coating is available for bearing races and provides corrosive resistance equivalent to 440C stainless steel. C Due to the many combinations of chemicals and environment, consult Kaydon for specifi c application recommendations. Engineered for the special environments found in IC production >
-6 to 10 >
-8 Torr can be achieved with special lubricants and materials. >
Race Materials Lubrication • AISI 52100 steel• AISI 440C stainless steel
• 17-4 PH stainless steel • Oils or greases• Vacuum compatible options• High temperature lubricants• Corrosion protection additives Low particulates Particulate generation is the primary failure mode of bearings in vacuum surface treatments. Materials and lubricants can be specifi ed to extend bearing operational life. >
Ball Materials Non-magnetic bearings >
• AISI 52100 steel
• AISI 440C stainless steel
• Silicon nitride
• Borosilicate glass For lightly loaded applications, hybrid bearings can improve torque characteristics and extend life. >
Shields and Seals Chemical compatibility >
• NBR (standard)• Viton*
• Acetal
• PTFE
• Corrosion resistant steel
• Custom integral designs Kaydon can recommend special materials or processing for corrosive chemical environments such as acidic or basic vapors and liquids. >
Cage Materials Design verifi cation >
• Nylon– Temperature limits of 180°F– Low torque
• Peek
– Excellent for vacuums
– Temperature limits of 250°F• Brass– Temperature limits of 250°F– Good for atmospheric conditions• 300 series stainless steel• Phenolic– Good for high speed• 17-7 PH stainless steel• PTFE– Low torque– Good for vacuums• Alternative custom alloys and polymers To help you optimize the perfor-mance of your Reali-Slim bearings, Kaydon will be happy to provide a bearing recommendation and a specifi cation control drawing for your reference. Whatever the special demands of your semiconductor manufacturing equipment application, we can recommend a bearing with the specifi c combination of the characteristics you need. Our Reali-
Slim bearings can be optimized to minimize friction, outgassing, contamination, corrosion and even wear. All of these can be achieved without sacrifi cing bearing accuracy. >
FEA: Contact stress analysis 4 >
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TURNING IDEAS INTO ENGINEERED SOLUTIONS