K-Patents Semicon Process Refractometer PR-23-MS - 6 Pages

  1. P. 1

  2. P. 2

  3. P. 3

  4. P. 4

  5. P. 5

  6. P. 6

Catalogue excerpts

REAL-TIME CONCENTRATION MONITORING OF FAB CHEMICALS SEMICON PROCESS REFRACTOMETER PR-23-MS SB:PR-23-MS/3

 Open the catalogue to page 1

APPLICATIONS K-Patents Semicon Process Refractometer PR-23-MS monitors real-time the consistency of liquid chemical concentrations throughout the whole semiconductor fabrication process, i.e. from chemical supplies down to fab in-line and tool in-situ chemicals quality control. BULK CHEMICAL SUPPLIES Changes in chemical quality can occur during in-house handling and storage. PR-23-MS activates an alarm if the chemical is not within pre-set specifications and prevents wrong chemicals or wrong concentrations from entering the process. PHOTORESIST DEVELOPMENT The photoresist developer concentration...

 Open the catalogue to page 2

REAL-TIME MONITORING SENSOR MOUNTING REMOTE USABILITY K-Patents key area of expertise over the past 30 years has been applying in-line refractive index measurement technique to industrial process control applications. The PR-23-MS is mounted directly in-line without filtering. The compact design allows integration in a wet bench or in a cabinet and the need for foot print area is very low. K-Patents Semicon Process Refractometer PR-23-MS is designed specifically for the semiconductor industry. It is physically small and easy to install in the bulk chemicals supply lines, and in the point of use...

 Open the catalogue to page 3

DIGITAL MEASUREMENT PRINCIPLE DRIFT-FREE CALIBRATION Optical image Prism Light source The sensor is factory calibrated to measure refractive index n D and temperature T in standard units. Each sensor has identical calibration nD=1.32...1.53 (corresponding to 0-100% b.w.). One or two sensors can be connected to one Indicating transmitter. Critical angle Process medium The light source sends light against the interface between the prism and the process solution, where the rays meet the surface at different angles. Prism Reflected light The angle corresponding to the shadow line is called the Critical...

 Open the catalogue to page 4

DESIGN Air cooling fins Image digitizer Thermal conductor Thermal isolation Thermal isolation (Ceramic) Sapphire adaptor Flow cell (Modified PTFE) CCDcamera Prism Temperature sensor Light source CORE-Optics K-Patents PR-23-MS advances the patented CORE-optics (Compact Optical Rigid Element) module that is isolated from the sensor body. The COPE-optics secures the measuring components from any influence of pressure, flow or temperature changes. (US Patent Nos. US6067151 and US6760098 B2, German Patent No. DE19855218).

 Open the catalogue to page 5

SPECIFICATIONS B 1s undamped, damping time selectable up to 5 min No mechanical adjustments and digital measurement with 3648 pixel CCD element, [2 , R 6 362 0 ] [2,756] Ø70 Repeatability: R.I. ± 0.0001 (corresponds typically to ± 0.05% b.w.). Patented CORE-Optics: Flare or Pillar fitting R.I. ± 0.0002 (corresponds typically to ± 0.1% b.w.). Speed of response: A nD=1.2600...1.4700, sapphire H74 prism (for Hydrofluoric acid, HF) Epoxy coated stainless steel Full range, nD=1.3200...1.5300 (corresponds to 0...100% b.w.), sapphire H73 prism Refractive Index range, option: Accuracy: SENSOR PR-23-MS...

 Open the catalogue to page 6

All K-Patent Oy catalogues and technical brochures

  1. PR-23-AC

    6 Pages

    En
  2. PR-23-A

    6 Pages

    En
  3. PR-33-S

    6 Pages

    En
  4. PR-33-AC

    6 Pages

    En
  5. SeedMaster 2

    4 Pages

    En