JEBG Series / Electron Beam Sources - Jeol - #5

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BS-60030DGN
Electron Beam Source
• Accommodating materials up to 40 mm in diameter
• Long life filament
• Improved techniques to prevent anomalous electric discharge
• Simple maintenance
• High-reproducibility evaporation
Optional Polepiece cover BS-70010PCV
External dimensions
152
CD
4
Standard position for beam irradiation
Standard surface
30
cri
CO
3
is
LO CO
Specifications
Maximum output
10 kW (1 A at 10 kV)
Electron beam deflection angle
XY scan width
XY position movement
Crucible
Workable pressure
Flow rate of cooling water
5 to 8 L/min. (water temperature: 10 to 25°C), Pressure difference: 0.15 to 0.3 MPa
External dimensions
162 (W)x 152 (D)x 189.5 (H) mm
Weight
Approximately 9 kg
Corresponding power supply
5

pageCatalog pdf di En 2012-02-07-16