JEBG Series / Electron Beam Sources - Jeol - #4

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BS-60040VDGN
Accelerating voltage Variable Electron Beam Source
m
Optional Polepiece cover BS-70010PCV
External dimensions
191
CD
Standard position for beam irradiation
T Standard surface
Specifications
Maximum output
Accelerating voltage range
Electron beam deflection angle
XY scan width
XY position movement
Crucible
Workable pressure
7.0 x 10-2to 5.0 x 10-5Pa
Flow rate of cooling water
5 to 8 L/min. (water temperature: 10 to 25°C), Pressure difference: 0.15 to 0.3 MPa
External dimensions
162 (W) x 191 (D) x 189.5 (H) mm
Weight
Approximately 10 kg
Corresponding power supply
JST-3F, JST-10F, JST-16F
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pageCatalog pdf di En 2012-02-07-16