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| | | BS-60040VDGN Accelerating voltage Variable Electron Beam Source | | |
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| | | Optional Polepiece cover BS-70010PCV | | |
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| | | External dimensions | | |
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| | | 191 | | |
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| | | CD | | |
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| | | Standard position for beam irradiation | | |
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| | | T Standard surface | | |
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| | | Specifications | | |
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| | | | | | | | | | Maximum output | | | | | Accelerating voltage range | | | | | Electron beam deflection angle | | | | | XY scan width | | | | | XY position movement | | | | | Crucible | | | | | Workable pressure | 7.0 x 10-2to 5.0 x 10-5Pa | | | | Flow rate of cooling water | 5 to 8 L/min. (water temperature: 10 to 25°C), Pressure difference: 0.15 to 0.3 MPa | | | | External dimensions | 162 (W) x 191 (D) x 189.5 (H) mm | | | | Weight | Approximately 10 kg | | | | Corresponding power supply | JST-3F, JST-10F, JST-16F | | | | | | | | | |
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