F series
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PDF-W 0051-04 Pneumatic drive bellows pumps F series

For ultrapure chemical delivery in semiconductor processing The F series comprises pneumatic drive bellows pumps designed for use in semiconductor manufacturing processes. Iwaki pneumatic drive bellows pumps were introduced to the market over 20 years ago; since then we have actively developed and improved products in step with rapidly changing market needs. Over 20 models of pumps are available. Their quality and performance are recognized and highly rated by device manufacturers all over the world. Not only pumps, but peripheral devices such as controllers, dampeners and liquid chemical...

Pneumatic drive bellows pumps Contamination-free Design Built-in Leak Sensor Enhanced Accessories All the wetted parts are made of fluororesin which is highly resistant to chemical attack and heat. Fiercely corrosive liquids are safety transfer with less particle matter being produced. As standard equipment, all the models have leak sensors which are ensured to react promptly if the bellows are damaged. Dampeners, controllers and other accessories have been improved and refined. Their use minimizes particle production and extends the life of the bellows. Sensor-drive System The pump is...

Pneumatic drive bellows pumps Robust bellows design advances high pressure performance and service life FW-20T1 FW-20HT2 Pneumatic drive bellows pumps The adoption of thick bellows enables the pump to discharge liquid under pressure as high as 0.45 MPa maximum. Moreover, the bellows have three or four times as long a life as a diaphragm. Thus, the downtime can be substantially reduced. FW FW-H In addition to its use in feeding chemical liquid, the FW series specified for high pressure and medium temperature (10 to 100˚C) is usable in a cleaning system and for the circulation of CMP slurry...

Energy saving design to consume less air FF-20HT FF-20BT Pneumatic drive bellows pumps The FF series are specified for use with medium temperature liquids (The PVC cylinder type: 5 to 50˚C; Al cylinder type: 5 to 100˚C) and the FF-H series are designed to handle a wide range of chemical liquids ranging from ordinary temperatures to high temperatures (20 to 180˚C). FF FF-H The suction port and discharge port are of PFA tubular structure in the FF-H series. For the FF series, a tubular structure type and pump attached with special fitting are available. When connected to a special controller,...

Pneumatic drive bellows pumps Two models for circulating medium temperature liquid FA-2E FA-40VEW Pneumatic drive bellows pumps There are two standardized models; the FA-2E, a lateral type for a low flow rate, and the FA-40VEW, a vertical type for a high flow rate. The FA-2E employs a spray system for single wafer processing while the FA-40VEW is suitable for cleaning 200/300 mm wafers. FA H-shaped thick bellows are used(Only FA-40VEW). They have excellent resistance to high pressure and a long life to withstand continuous long-time operation. When connected to a special controller, the...

Optional accessories Automatic dampeners Dampeners PDA-H/PDA-W Pump driver PD-H PDA-20W Pump pressure can be automatically adjusted to minimum pulse pressure regardless of a change in the discharge of the pump likely to be caused by the clogging of a filter. Particles are hindered from passing through filters and pipes are protected from vibrations. FD-1/FD-2 PD-10H FD-2 Having no automatic pressure adjustment mechanism. Pump drivers FD-1/2 are low-cost drivers. The FD-1 is for the FF, FF-H, and FA pumps and the FD-2 for the FW and FW-H pumps. As its fixed stroke rate control function...

Pneumatic drive bellows pumps Pump controller Pump controller SC-1/SC-2 Pump controller As it controls the pump at a fixed level of discharge when it is connected to a vacuum regulator, stable circulation and filtration continue despite possible fluctuation of a discharge load due to clogging of the filter or some other reason. Since the difference between the inside pressure and the outside pressure of the bellows can be held at a minimum level, an increase in the life of the bellows is to be expected. Monitoring of the flow rate, the number of strokes and total count are possible. There...

Pneumatic drive bellows pumps 10

Pneumatic drive bellows pumps Chemical fluid dispensing system CFD/APD The Iwaki chemical fluid dispensing system, made up of a pump (CFD) and a controller (APD), is capable of metering and supplying, in addition to hydrochloric acid solutions and hydrofluoric acid solutions, ammonia water which has a high vapor pressure, and a hydrogen peroxide solution which tends to produce bubbles, with high precision. Two types are available; the pneumatic valve type CFD-8T/APD-3 and the ball valve type CFD-8T-B/ APD-3B. Note: The pneumatic valve is excluded from the specifications. One APD controller...