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2D-stage with linear motor PT 15

This 2D-linear stage is designed for applications that need a free travel above the working surface. Driven by one iron-based and one ironless linear motor, position feedback by a non-contact linear encoder and controlled by our Pegasus controller, this device is a new component for high precise positioning. The PT15 is the ideal stage for clean room applications with its stainless steal cover und clean room lubrication. For exact planar positioning this special gantry version is mounted on a granite plate. This design eliminates the abbey errors which occurs in a cross configuration. All cables are connected at the fixed side of the planar and cross type. Adjustable proximity switches are easily reached for travel range adjusting. FEM optimisation at the design phase and the using of special aluminium alloy accomplish reduced weight, high stiffness and long-term stability.

Features Applications

Linear motor driven Non contact position sensors Pick and Place unit No backlash Measurement stages High accuracy Fast an precise micromanipulators High resolution All kinds of high precision positioning which needs long distance travel Long lifetime Smooth moving at 1µm/s Maximum speed 1000 mm/s Compatibility above the wafer w