Vacuum Control catalog - INFICON - #29

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Vacuum Gauges SKY® Capacitance Diaphragm Gauge Vacuum Control Catalog 2009 - A22 Ordering Information AllCeramic™ CDG160A-C / CDG160A-CS SKY® Capacitance Diaphragm Gauges Applications The INFICON SKY AllCeramic CDG160A-C is the only completely metal-free 160°C temperature controlled capacitance diaphragm gauge designed for demanding applications, such as oxidation, diffusion and LPCVD. All surfaces exposed to the vacuum such as tubing, plasma shield and contamination protection shield are composed of corrosion-resistant ultra pure aluminum oxide ceramic, eliminating potential metal contamination from the gauge. The INFICON SKY AllCeramic CDG160A-C integrates the proven sensor technology of the INFICON CDG160A series of gauges for reliable and repeatable performance in LPCVD and other harsh semiconductor manufacturing applications. Advantages �¡ Metal-free ultra pure ceramic design prevents metal contaminations �¡ Temperature controlled to 160°C prevents condensation of process products and by-products �¡ Compact design saves valuable space and simplifies tool integration �¡ High ambient temperature compatibility �¡ Enhanced particle protection chamber with an additional protection shield (Suprashield) reduces the probability of gauge contamination �¡ Unique ceramic sensor design provides repeatability and accurate measurements with excellent long-term stability �¡ Optional set point and status indication provides additional control and safety functions �¡ Oxidation, diffusion and LPCVD processes �¡ Other metal-free vacuum measurement requirements Full scale (Pa1)) Type Set point Flange 133322 13332.2 1333.22 133.322 CDG160A-C none 1/2” tube 371-260 371-261 371-262 371-263 CDG160A-CS 2 1/2” tube 371-270 371-271 371-272 371-273 1) Other pressure units on request