Vacuum Control catalog - INFICON - #19

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Vacuum Gauges SKY® Capacitance Diaphragm Gauge Vacuum Control Catalog 2009 - A12 Specifications (Torr based standard products) CDG100D (continued) Measurement Range Torr 1000 100 10 1 0.1 F.S. (Full Scale) Pa 133,322 13,332 1,333 133 13 mbar 1333 133 13.3 1.3 0.13 Accuracy1) % of reading 0.2 0.4 Temperature effect on zero % F.S./°C 0.0025 0.005 on span % of reading/°C 0.02 Pressure, max. kPa (absolute) 400 260 130 Resolution % F.S. 0.003 Lowest reading % F.S. 0.01 Lowest suggested reading % F.S. 0.05 Lowest suggested control pressure % F.S. 0.5 Temperature Operation (ambient) °C +10 ... +50 Bakeout at flange °C 110 Storage °C –40 ... +65 Supply voltage +14 ... +30 VDC or ±15 V (±5%) Power consumption During Heat up W 15 At operating temperature W 10 Output signal (analog) VDC 0 ... +10 Response time ms 30 130 Degree of protection IP 40 Standards EN 61000-6-2, EN 61010, UL 61010-1, CSA 22.2 No.61010-1, SEMI S-2 Electrical connection D-sub, 15 pole, male Setpoint two setpoints (SP1, SP2) Relay contact VDC / ADC 30 / 0.5 Hysteresis % F.S. 1 Diagnostic port Protocol RS232-C Read pressure, status, ID, Set set points, filter, zero adjust, factory reset, DC offset Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L2)), Nickel, sealing glass 1) Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after 2 hours operation. 2) 18% Cr, 10% Ni, 3% Mo, 69% Fe Measurement Range Torr 500 200 50 20 5 2 0.5 0.25 F.S. (Full Scale) Pa 66,661 26,664 6,666.1 2,666 666.61 266.66 66.66 33.3 mbar 666.61 267 66.67 26.7 6.6661 2.67 0.67 0.33 Accuracy1) % of reading 0.2 0.4 Temperature effect on zero % F.S./°C 0.0025 0.005 on span % of reading/°C 0.02 Pressure, max. kPa (absolute) 400 260 130 Resolution % F.S. 0.003 Further specifications see table above. Specifications (Torr based other ranges)