Transpector®2 Gas Analysis System - INFICON - #6

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® N/A = not applicable * Electronics and sensors may be purchased separately. Multiplexing operation requires optional software. 1 Minimum detectable partial pressure is calculated as the standard deviation of the noise (minimum detectable signal) divided by the sensitivity of the sensor (FC or EM) measured at a four-second dwell time. Transpector and FabGuard are registered trademarks and TWare32 is a trademark of INFICON. All other trademarks are the properties of their respective owners. 4.87" [12.4 cm] 5.62" [14.3 cm] 6.87" [17.5 cm] 7.75" [19.7 cm] C series 8.17" [20.8 cm] H series 4.87" [12.4 cm] 5.62" [14.3 cm] 6.65" [16.9 cm] C100F, C100M 8.6" [21.9 cm] H100F, H200F, H300F 12.1" [30.7 cm] H100M, H200M, 2. SPECIFICATIONS Global HEADQUARTERS: Two Technology Place, East Syracuse, NY 13057 USA Tel: +1.315.434.1100 Fax: +1.315.437.3803 E-mail: reachus@inficon.com Visi t our websi te for contact informat ion and sales of f ices wor ldwide. www. inf icon.com Due to our continuing program of product improvements, specifications are subject to change without notice. aibb95a1-b ©2005 INFICON C100F C100M H100F H100M H200F H200M H300F H300M Sensor length (vacuum side) 4.6" (11.7 cm) 7" (17.8 cm) 10.4" (26.4 cm) 7" (17.8 cm) 10.4" (26.4 cm) 7" (17.8 cm) 10.4" (26.4 cm) Mass Range 1 to 100 amu 1 to 100 amu 1 to 200 amu 1 to 300 amu Detector Type FC Microchannel FC EM/FC FC EM/FC FC EM/FC Plate EM/FC Resolution (per 1993 AVS Recommended Practice) < 1 amu wide @ 10% peak height over the entire mass range Temperature Coefficient (during an 8-hour period, < 1% of peak height per degree C (for FC Only) after a half hour warm-up) Sensitivity— amps/Torr (mbar/Torr): FC 2x10-4 (1.5x10-4) 2x10-4 (1.5x10-4) 2x10-4 (1.5x10-4) 1x10-4 (7.6x10-5) 2x10-4 (1.5x10-4) 1x10-4 (7.6x10-5) 1x10-4 (7.6x10-5) 5x10-5 (3.8x10-5) EM N/A 0.25 (0.2) N/A 500 (380) N/A 500 (380) N/A 250 (190) Min. Detectable Partial Pressure1—Torr (mbar): FC 3x10-13 (4x10-13) N/A 3x10-13 (4x10-13) N/A 3x10-13 (4x10-13) N/A 6x10-13 (8x10-13) N/A EM N/A 3x10-14 (4x10-14) N/A 5x10-15 (6.6x10-15) N/A 5x10-15 (6.6x10-15) N/A 1x10-14 (1.3x10-14) Zero Blast Interference at Mass 2 < 100 ppm Max. Operating Pressure— Torr (mbar): 5x10-4 (6.6x10-4) Max. Sensor Operating Temp. FC 200°C 200°C 250°C 250°C 250°C 250°C 250°C 250°C EM N/A 150°C N /A 150°C N /A 150°C N /A 150°C Max. Bakeout Temperature (electronics removed) 200°C 350°C 350°C 350°C 350°C 350°C 350°C Operating Temperature 20°C to 50°C ambient Power Input 20 to 30 V DC, 9-pin male “D” connector, internally isolated from system ground RS232 Serial Communications Interface nonisolated, baud selection 1200 through 9600, 9-pin female “D” connector, TxD, RxD, CTS, DTR RS485 Addressable Communications Interface isolated, 4 wire, 57,600 baud fixed, half duplex, global address @ 0, fixed address 1 of 31, 9-pin female “D” connector, +TxD, -TxD, +RxD, -RxD Relay Outputs 4 relays, 24 V at 0.5 amps (1 for operational status, 3 for setpoint limits) Inputs 2 nonisolated TTL inputs, contact closure (1 for remote emission on, 1 for remote emission off); 2 differential analog inputs, 0 to 10 V DC Electronics Enclosure drip-resistant User-Configured Switches (8-position DIP switch) 5 positions: device address (1 of 31); Primary Link Select (RS232/485); 2 positions: baud rate LED Indicators (green) 1 for CPU status, 1 for emission status