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Text version of the page
| bKYw Lapaeitanee Diaphragm (jaugej_ VcHUUIII VJcIUUCj | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| SKY® Capacitance Diaphragm Gauge CDG10OA / CDG10OA-S irfH The INFICON SKY® CDG100A is a compact, accurate and reliable 100 °C temperature controlled Capacitance Diaphragm Gauge featuring ultra pure aluminum oxide ceramic diaphragms instead of the traditional metal diaphragms. Ultra pure ceramic diaphragms are virtually corrosion-proof resulting in improved reliability, stability and extended lifetime, even under the harshest tool conditions. The CDG100A process manometer is temperature controlled to 100 °C, which prevents condensation of process products and by-products, thereby increasing the long-term stability and enhancing process control. Additionally, the CDG100A series features improvements in shielding the sensor against contamination as well as in electrical and mechanical robustness. These measures lead to superior stability and reliability even in aggressive process and tool environments. SKY® CDGs are used by leading semiconductor system manufacturers for improved process control. Advantages ■ Alumina Ceramic Diaphragm for excellent corrosion resistance in aggressive process environments ■ Temperature controlled to 100 °C prevents condensation of process products and by-products ■ Integrated particle protection chamber and additional protection shield reduces the probability of gauge contamination ■ Compact design with integrated electronics saves valuable space and simplifies tool integration ■ Improved accuracy for more consistent pressure measurement and reliable process control ■ High speed version (CDG100A-H) for applications requiring fast response time, e.g. pressure control applications ■ Improved accuracy for more consistent pressure measurement and reliable process control ■ CE compliant - meets the EMC standards for the European Market ■ Plug and play for INFICON and other leading brands Applications ■ Etch, CVD, PVD and other semiconductor production processes ■ Chemical process engineering ■ High temperature process applications | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| Ordering Information | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
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| 1> Other pressure units and flanges on request | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| INFICON | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| mum Control Catalog 2005-2006 - A9 | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||