Inficon - Vacuum Control Catalog - INFICON - (Version JPG) - Page n° 151 - PDF Catalogue | Technical Documentation

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Headspace sampler, Sampler, Detector, Diaphragm valve, Angle valve

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Vacuum Valves | Ail-Metal Dosing Valves and System

Ail-Metal Dosing Valves and System

VDH04O-U / VDE04O-U / VCE500

Advantages_

■ Minimal dead volume

■ Controlled routing of the gas flow using capillaries

■ Operating temperature 200 °C

■ Control of total pressure or gas flow

■ Automatic control in conjunction with VDE40-U and VCE500

Selection Data

Actuator manual manual and thermo-mechanical

Ordering Information VDH040-U / VDE040-U Type VDH040-U VDE040-U

Valve 250-700 250-720

Specifications


Connection flange
Input		DN 16 CF-R	DN 16 CF-R
Output		DN 40 CF-F	DN 40 CF-F
Gas flow, controllable
Min.	mbar/ls	1 x IO-™	1 x IO-™
Max.	mbar/ls	600	100 1)
Tightness	mbar/ls	1 x 10-"	1 x ion
Pressure absolute min/max	mbar/ls	1 x 10"'30	1 x 10-i°'30
Conductance for molecular flow	l/s	0.7	0.7
Operating temperature	°C	200	200
Bakeout temperature	°C	350	350 «
Valve plate		sapphire	sapphire
Valve seat		copper	copper
Housing		stainless steel	stainless steel
Weight	kg	1.4	1.4

1) Can be regulated with the VCE500 Controller

2) Without cable

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Vacuum Control Catalog 2005-2006 - C44