Datasheet - VAH DN16-63 CF-R - INFICON - #1

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ORDERING INFORMATION SPARE PARTS SPECIFICATIONS SELECTION DATA STANDARD DN 16-63 Manually Actuated Angle Valves with CF-Flanges ( VAH )
For UHV and HV applications
Bakeable at up to 180°C in open and closed position
FPM sealed
Maintenance-free ALL-METAL
For UHV applications
Bakeable at up to 300°C in open and closed position
Copper sealed
Maintenance-free STANDARD ALL - METAL Vacuum connection DN16 CF-R DN40 CF-R DN 63 CF-R DN16 CF-R DN40 CF-R DN 63 CF-R Tightness mbar l/s 1 X 10-10 1 X 10-10 1 X 10-10 5 X 10-11 5 X 10-11 5 X 10-11 Bakeout temperature w/o hand wheel °C 180 180 180 300 300 300 Type VAH016-Z VAH040-Z VAH063-Z VAH016-U VAH040-U VAH063-U Part No. 250-731 250-736 250-741 250-730 250-735 250-740 Service life cycles 50 000 50 000 50 000 1000 1000 1000 Conductance for molecular flow l/s 3 38 100 3 38 100 Pressure (absolute) min. / max. mbar/bar 1 x 10-9 / 4 1 x 10-9 / 4 1 x 10-9 / 4 1 x 10-10 / 4 1 x 10-10 / 4 1 x 10-10 / 4 Tightening torque Nm 1 1.8 2.5 8 … 10 20 … 40 30 … 60 Heating and cooling rate °C/min — — — 4 4 2 Bellows, stainless steel AISI/DIN 321/1.4541 321/1.4541 321/1.4541 321/1.4541 321/1.4541 321/1.4541 Housing, stainless steel AISI/DIN 304/1.4301 304/1.4301 304/1.4301 304/1.4301 304/1.4301 304/1.4301 welded welded welded welded welded welded Valve plate, seal FPM FPM FPM copper copper copper Valve plate, stainless steel AISI/DIN 304/1.4301 304/1.4301 304/1.4301 304/1.4301 304/1.4301 304/1.4301 Weight kg 0.35 1.8 4.8 0.4 2.0 5.0 FPM seal, 10 pieces Part No. 215-341 215-342 215-343 — — — Copper seal, 2 pieces Part No. — — — 215-344 215-345 215-346