Vapor Concentration Monitor_IR-300
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Vapor Concentration Monitor

In-line, compact Vapor Concentration Monitor enables MOCVD precursor delivery to be stable, resulting in improved performance and device yield r Metal-Organic Chemical Vapor Deposition (MOCVD) is widely used in the manufacture of LEDs, optical devices and other components. Liquid and solid precursors are delivered to the reaction chamber by controlling the temperature, pressure and the carrier gas flow rate (bubbling method). Process results can be affected by changes especially in temperature and liquid level. The in-line IR-300 Series measures and reports the precursor concentration in...

Ideal precursor supply through reliable, high-performance vapor concentration monitoring and uid control backed by a global service support system. The analysis technology of global analytical equipment manufacturer HORIBA, Ltd. has been combined with the fluid control technology of HORIBA STEC, Co., Ltd. in the creation of the IR-300 Series Vapor Concentration Monitor. This innovative solution for concentration measurement enables new processes, provides an easy to install, compact solution for our customers, and is supported by HORIBA group's world class global service support network....

Real-time monitoring for a stable vapor concentration supply Real-time Monitoring Response and repeatability that allow tracking of changes in vapor concentration A high optical intensity, long-life source combined with a high-speed signal processor enables the IR-300 Series to achieve faster, more repeatable responses to changes in precursor concentration (more than two times better than HORIBA priorgeneration technologies), in turn enabling new processes with real-time inline concentration measurement. * For stable monitoring, zero calibration prior to measurement (at least once per day)...

Convenient Onsite Checking Multi-display Function The multi-display function of the IR-300 Series combines a display and mode LEDs on the top of the unit for onsite checking of concentration monitoring and precursor supply line status. By switching the mode LEDs, the display on the top of the unit can show the following. Vapor concentration display Self-diagnostic Function Gas cell temperature display* Gas cell internal pressure display The IR-300 Series features a self-diagnostic function that detects maximum and minimum gas cell temperatures, insufcient light intensity and zero...

Connector examples Analog Communication [Example using an external power source and input & output signals] Heater cable (IR-H31) Temperature controller Analog connector (for Concentration Monitor) Gas concentration monitor side: D-sub 9 pin female (M3 screw type) Zero calibration contact input signal K type thermocouple cable (IR-K31) Concentration output signal: 0 5 V DC Alarm contact output signal Power supply: ±15 V DC [Example using PE-D10 monitor unit and HC-100AE thermo-control unit] SC-EDH cable K type thermocouple cable (IR-K31) Concentration output signal: 0-5 V DC Signal N.C....

Gas cell optical path length Target chemical/ full-scale concentration *1 TMln / 1 vol% , TMIn / 2.5 vol% , TEGa / 1 vol% , TMGa / 1 vol% TMAI / 2 vol% , DEZn / 2.5 vol% , IPA / 1 vol% Measurement concentration range Sensor response Operating pressure range *2*5 Proof Pressure Operating flow rate range*2*5 Operating ambient temperature Setting gas cell temperature Gas cell temperature sensor Thermocouple K Type (Connector type: OMEGA SMP-K-F) Need temperature controller prepared by users Thermal switch More than 1 hour Wetted material Body: SUS316L, Gas cell optical window: Sapphire, Ag,...

The HORIBA Group's world-wide network ensures world-classs support for our customers. World-wide Network 3F, No.18, Lane 676, Jhonghua Rd., Jhubei City, Hsinchu County 302, Taiwan (R.O.C.) Tainan Office 1F, No.117, Chenggong Rd., Shanhua Township, Tainan County 741, Taiwan (R.O.C.) HORIBA Instruments Incorporated Santa Clara Office 3265 Scott Boulevard Santa Clara, CA 95054 Austin Office 9701 Dessau Rd., Suite 605, Austin, TX 78754 Portland Office Reno Office (R&D Center) 605 Spice Island Drive, #5, Sparks, NV 89431 315 Deny Road, Suite 13 Hudson, NH 03051, U.S.A HORIBA STEC Korea, Ltd....