SEC-Z500MGX
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Catalog excerpts

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STEC Fluid Control High Performance Mass Flow Controller

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a break-through in mass flow control technology

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The mass flow controller, is a key piece of semiconductor manufacturing equipment. Its quality and efficiency play a major role in the success or failure of the semiconductor manufacturing process. HORIBA STEC, a company that has consistently introduced high-quality, highly functional products to the demanding semiconductor manufacturing market, and thereby grown its worldwide market share to over 30%*1, has recently developed a new mass flow controller, one that breaks the mold completely and will change the future of mass flow control technology. That new mass flow controller is the...

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High accuracy High accuracy ±1.0% S.P. 5 Sensor output Gas flow rate characteristic curve Flow rate Gases used in semiconductor processes have a variety of different properties. The flow rate calibration function used in the SEC-Z500X series uses detailed measurement data about the flow rate characteristics of each type of process gas, across different flow rate ranges, as a basis for calibration. This huge store of measurement data paired with highly reliable sensors and the latest in calibration technology ensures extremely precise process gas flow rate control. 3 MFC's linearity is...

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We never compromise on performance. High-speed response throughout the flow rate range High speed response SEC-Z500X is installed with a newly developed "Variable PID system", which can achieve 1 second response to all setting points. Variable PID is continuously changing depending on setting flow points. This allows the PID factor to be optimized when you change full scale flow and gase. After changed full-scale to 25% Before changed full-scale MFC SET Response speed comparison, with and without the PID algorithm Response speed Before changed full-scale After changed full-scale to 25%...

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Multi-gas, multi-range solution MR/MG number Even when the same full-scale values are used, the MR/MG numbers associated with the full-scale flow rate values for the calibration gas may vary, due to variations in the thermal conductivity of the different process gases. To increase flow rate calibration precision, HORIBA STEC offers the following lineup of MR/MG numbers. Changing the full-scale flow rate List of full-scale flow rates for different gases HORIBA STEC has made it possible for the user to change the type of gas or full-scale flow rate on site. Our special Z500 configuration...

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Configuration software that allows the user to alter specifications on-site The SEC-Z500X offers multi-gas, multi-range functionality, thanks to its configuration software. This software makes it possible to select MR/MG numbers simply by entering the type of gas being used and the flow rate range, and also features a handy N2 gas conversion feature for flow rate measurements using N2 gas during receipt inspections. To ensure that the software is used without error, HORIBA STEC offers software operation seminars. For information on these seminars, please contact your HORIBA STEC...

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Product specifications Digital/Analog communication models Mass flow controller model Mass flow meter model MR/MG number MR/MG number (N2 conversion flow rate) Full-scale flow rate #06: 10 SLM O: Normally open C: Normally close Valve Type Flow rate at fully closed control valve Flow rate control range Flow rate measuring range (SEF) Accuracy ±1.0% S.P. (Flow rate > 25% F.S.) ±0.25% F.S. (Flow rate 5 to 50°C (recommended temperature range: 15 to 45°C) Operating temperature 1 second: over full flow rate range Repeatability Operating differential pressure Operating differential pressure (SEF)...

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Mass flow controller model Mass flow meter model Flow rate at fully closed control valve Flow rate control range Flow rate measuring range (SEF) 0-100% of F.S. ±1.0% S.P. (flow rate > 35% F.S.) ±0.35% F.S. (flow rate 1.5 second: over full flow rate range (typically 1 second) 1 second: over full flow rate range ±0.2% F.S. Repeatability Operating differential pressure Operating differential pressure (SEF) Pressure resistance Leak Integrity 0.25 to 5 V DC (5% to F.S.): input impedance 1 M 0 to 5 V DC (0% to F.S.): minimum load resistance 2 k Flow rate setting signal Flow rate output signal...

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Product specifications Digital/Analog communication models DeviceNet™ communication models Connector for digital transmission RS-485 transmission Daisy chain available DeviceNet™ connector DeviceNet™ transmission and shield type micro connector Analog connector Analog transmission and power supply Baud rate setting switch ZERO adjust switch Switch for zero adjust ZERO adjust switch Switch for zero adjust Address switch Set from 0 x 01 to 0 x 99 (Not available from 0 x A to NET :Status for network MOD :Status for node Analog transmission: Green right on Digital transmission : Green right...

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Digital/Analog communication models Compatible with 1.5 inch IGS Compatible with 1.5 inch IGS DeviceNet™ communication models SEC-Z514KX Compatible with 1.5 inch IGS Accumulated joint mounting dimensions 1.125-inch compatible models Distance between ports 92 mm Distance between ports 79.8 mm

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Connector examples Digital communication RS485 digital communication connector Converter PC Power Supply (PE Series) SC-EBR cable Signal name Signal ground [D. COM] Signal ground [D. COM] N.C. Serial output/input (-) Serial output/input (+) N.C. N.C. N.C. Daisy chain connection Analog communication Using an external power source and control signal Analog connectors SC-EAH series signal cable Flow rate setting signal: 0 to 5 V DC Flow rate output signal: 0 to 5 V DC Valve voltage monitor (option) Valve control signal: Fully open/fully close Power supply: ±15 V DC Using PE-S7 control unit...

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eDiagnostic digital mass flow controller monitoring system The importance of preventative maintenance for production equipment in Sample system setup semiconductor device manufacturing plants is widely acknowledged. In fact, Surveillance System preventative maintenance is considered a critical factor for increasing productivity. controllers, which are considered key devices in the semiconductor manufacturing process. The mass flow controller’s preventative maintenance system monitors the HORIBA STEC offers a preventative maintenance system for its mass flow Logging unit Logging unit Logging...

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