Smart SE
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Catalog excerpts

Sp e c t ro s copi c E l l i ps o me t e r for Thin Film A na ly si s The Smart SE is an innovative spectroscopic ellipsometer for easy, fast and accurate characterization of single and multi layers thin films. HH Fast and Accurate The CCD detector of the Smart SE acquires accurate ellipsometric data from 450 nm to 1000 nm in less than 1 second The optical head of the Smart SE are mounted on a compact manual angle of incidence that allows data acquisition from 45° to 90° by step of 5° The Smart SE can be upgraded with: ¬¬ 200 mm or 300 mm mapping stage for uniformity measurements ¬¬ Automated variable angle of incidence for complex analysis ¬¬ In-situ configuration for real-time process monitoring Visualization of the spot on the sample with the MyAutoView vision system HH Unique Capabilities ¬¬ MyAutoView vision system for accurate positioning of the spot on any opaque or transparent substrates ¬¬ Seven automated micro spot size for measurements of patterned samples ¬¬ Full Mueller matrix measurement capability to study anisotropic and depolarizing samples HH Thin Film Applications ¬¬ Film thickness from few Å to 15 µm ¬¬ Optical constants (n, k) ¬¬ Optical bang gap ¬¬ Gradient, anisotropy and depolarization Automotive Test Systems | Process & Environmental | Medical | Semiconductor | Scientific

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User Oriented Software Platform The Smart SE integrates two level of software to fulfill both routine analysis with predefined recipes and advanced analysis with state-of-the-art ellipsometric algorithm: HH Auto Soft Routine Mode ¬¬ Auto Soft is an intuitive software that allows inexperienced users to acquire and analyze data in one push of a button ¬¬ Four interfaces to control the system, run an experiment, manage the data and perform maintenance test ¬¬ Predefined recipes are listed by applications and materials ¬¬ Fitting and tabulated data are presented on the same screen for fast...

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