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General Information

Feature:

HTC is pleased to offer vacuum valves designed and manufactured in Tainan, Taiwan, R.O.C.These valves are the result of a long and careful development program designed to insure prod- uct quality, reliability and value. Every effort has been made to provide a valve family suited to the requirements of various users.They will function reliably in applications ranging from semiconductor production system with chemical and particulate contamination. Long life operation. Stainless steel welded bellows seal. Manual and electropneumatic actuation or fail safe operators (closes in the event of air pressure loss). Bakeable to 200°C intermittently, Viton seal bonnet. Compact size. Simple and fast maintenance. Simple control via solenoid valve with manual override.

Specifications:

Body:304 S.S. (Other material available upon request) Poppet:304 S.S. (Other material available upon request) Bellows:Welded AM-350 (option) Solenoid:Option Position indicator:Option Seal:Viton O'ring Leak rate:2x10
-9 std.cc./second Pressure range:1x10
-9 torr to 760 torr Viton seal bonnet Maximum pressure before opening :1.2 Bar Operating air pressure:4 ~ 6.5 kg/cm
2 Cycles until service:16 to 50 ~ 500,000 (full orifice open)63 to 150 ~ 250,000200 to larger ~ application dependent Bake-out limitation:150°C Viton seal bonnet Larger or special size available upon request
6 - All information contained herein was current at time of publication we reserve the right to change the design/specification for products improvement without notice.