| | Detection method | Application MCP assembly ^\ | Time-of-flight mass spectroscopy (TOF-MS) | Quadrupole mass spectroscopy (Q-MS) | Double focusing mass spectroscopy (Sector-MS) | Gas or liquidchromatographic mass spectroscopy (GC/LC-MS) | Inductive-coupled plasma mass spectroscopy (ICP-MS) | Secondary ion mass spectroscopy (SIMS) | | | Electron beam measuring system (EBMS) | Electron or ion beam lithography | Mask aligner | FIB system | | Ion scattering spectroscopy (ISS) | Electron spectroscopy for chemical analysis (ESCA) | Rutherford backscattering spectroscopy (RBS) | Vacuum UV spectroscopy (VUVS) | Soft X-ray spectroscopy (SXS) | | Low energy electron diffraction (LEED) | Field ion microscope (FIM) | Tranmission electron microscope (TEM) | Soft X-ray microscope (SXM) | Positron detector | |